Conversion of Solution-Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

Spin‐on perhydropolysilazane (PHPS) thin films were converted into mechanically hard silica thin films by an exposure to the vapor from aqueous ammonia. Infrared absorption and X‐ray photoelectron spectroscopic analyses were conducted to clarify the details of the PHPS‐to‐silica conversion and the n...

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Veröffentlicht in:	Journal of the American Ceramic Society 2013-09, Vol.96 (9), p.2806-2816
Hauptverfasser:	Nakajima, Koji, Uchiyama, Hiroaki, Kitano, Takayuki, Kozuka, Hiromitsu
Format:	Artikel
Sprache:	eng
Schlagworte:	Ammonia Ceramics Condensation Conversion Hardness Moles Pencils Silica glass Silicon Silicon dioxide Silicon substrates Substrates Thin films
Online-Zugang:	Volltext
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