Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared

Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared

We demonstrate high-quality (Q) factor grating-coupled ring resonators in a silicon-on-sapphire platform, operating at wavelengths between 4.3 and 4.6 μm. Total Q-factors of 151 000 and intrinsic Q-factors of 278 000 are measured, representing the highest Q-factors measured at the mid-infrared in Si...

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Veröffentlicht in:Applied physics letters 2013-02, Vol.102 (5)
Hauptverfasser: Shankar, Raji, Bulu, Irfan, Lončar, Marko
Format: Artikel
Sprache:eng
Schlagworte:
Platforms
Resonators
Silicon
Wavelengths
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Beschreibung
Zusammenfassung:We demonstrate high-quality (Q) factor grating-coupled ring resonators in a silicon-on-sapphire platform, operating at wavelengths between 4.3 and 4.6 μm. Total Q-factors of 151 000 and intrinsic Q-factors of 278 000 are measured, representing the highest Q-factors measured at the mid-infrared in Si.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4791558