Active damping based on decoupled collocated control
Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge i...
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| Veröffentlicht in: | IEEE/ASME transactions on mechatronics 2005-04, Vol.10 (2), p.135-145 |
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| container_title | IEEE/ASME transactions on mechatronics |
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| creator | Holterman, J. de Vries, T.J.A. |
| description | Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge is used to obtain robust active damping. However, collocated control is inherently in terms of "local" coordinates, whereas vibration analysis is usually in terms of "modal" coordinates. Therefore, modal decoupling of the collocated control loops is required. It is shown that, under mild conditions, transformation of the control problem from local into modal coordinates yields control loops that again enable the implementation of passive and thus robustly stable control laws. The presented theory is illustrated by means of experiments on the six-degrees-of-freedom (DOF) actively controlled lens suspension within a micro-lithography machine. |
| doi_str_mv | 10.1109/TMECH.2005.844702 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_miscellaneous_1671469670</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1420321</ieee_id><sourcerecordid>2352154751</sourcerecordid><originalsourceid>FETCH-LOGICAL-c465t-e3978507eecb1549ac21747d0b4e8b4caa6f09c3dbfcfd8a8d8f68ed308fa33</originalsourceid><addsrcrecordid>eNp9kE1LxDAQhoMouK7-APFSPIiXrjNN2iTHZVk_YMWDe_AW0iSVLt2mNq3gv7fdCoIHT_MOPDPDPIRcIiwQQd5tn9erx0UCkC4EYxySIzJDyTAGZG_HQwZBY8ZoekrOQtgBAEPAGWFL05WfLrJ635T1e5Tr4Gzk68g64_umGhrjq8ob3R1i3bW-Oicnha6Cu_ipc_J6v96uHuPNy8PTarmJDcvSLnZUcpECd87kmDKpTYKccQs5cyJnRuusAGmozQtTWKGFFUUmnKUgCk3pnNxMW5vWf_QudGpfBuOqStfO90ElXIpMIg7g7b8gZhxZJjMOA3r9B935vq2HJ5TI-MiJ8TBOkGl9CK0rVNOWe91-KQQ12lYH22q0rSbbw8zVNFM65355lgBNkH4DkM16sg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>867671483</pqid></control><display><type>article</type><title>Active damping based on decoupled collocated control</title><source>IEEE Electronic Library (IEL)</source><creator>Holterman, J. ; de Vries, T.J.A.</creator><creatorcontrib>Holterman, J. ; de Vries, T.J.A.</creatorcontrib><description>Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge is used to obtain robust active damping. However, collocated control is inherently in terms of "local" coordinates, whereas vibration analysis is usually in terms of "modal" coordinates. Therefore, modal decoupling of the collocated control loops is required. It is shown that, under mild conditions, transformation of the control problem from local into modal coordinates yields control loops that again enable the implementation of passive and thus robustly stable control laws. The presented theory is illustrated by means of experiments on the six-degrees-of-freedom (DOF) actively controlled lens suspension within a micro-lithography machine.</description><identifier>ISSN: 1083-4435</identifier><identifier>EISSN: 1941-014X</identifier><identifier>DOI: 10.1109/TMECH.2005.844702</identifier><identifier>CODEN: IATEFW</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Active damping ; Actuators ; Control systems ; Damping ; decoupled control ; Decoupling ; Force control ; integral force feedback ; Law ; Lithography ; Mathematical models ; Mechanical variables control ; micro-lithography ; modal control ; multiple-input-multiple-output (MIMO) collocated control ; Open loop systems ; Robust control ; Signal processing ; Stability ; Transformations ; Vibration analysis ; Vibration control</subject><ispartof>IEEE/ASME transactions on mechatronics, 2005-04, Vol.10 (2), p.135-145</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2005</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c465t-e3978507eecb1549ac21747d0b4e8b4caa6f09c3dbfcfd8a8d8f68ed308fa33</citedby><cites>FETCH-LOGICAL-c465t-e3978507eecb1549ac21747d0b4e8b4caa6f09c3dbfcfd8a8d8f68ed308fa33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1420321$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1420321$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Holterman, J.</creatorcontrib><creatorcontrib>de Vries, T.J.A.</creatorcontrib><title>Active damping based on decoupled collocated control</title><title>IEEE/ASME transactions on mechatronics</title><addtitle>TMECH</addtitle><description>Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge is used to obtain robust active damping. However, collocated control is inherently in terms of "local" coordinates, whereas vibration analysis is usually in terms of "modal" coordinates. Therefore, modal decoupling of the collocated control loops is required. It is shown that, under mild conditions, transformation of the control problem from local into modal coordinates yields control loops that again enable the implementation of passive and thus robustly stable control laws. The presented theory is illustrated by means of experiments on the six-degrees-of-freedom (DOF) actively controlled lens suspension within a micro-lithography machine.</description><subject>Active damping</subject><subject>Actuators</subject><subject>Control systems</subject><subject>Damping</subject><subject>decoupled control</subject><subject>Decoupling</subject><subject>Force control</subject><subject>integral force feedback</subject><subject>Law</subject><subject>Lithography</subject><subject>Mathematical models</subject><subject>Mechanical variables control</subject><subject>micro-lithography</subject><subject>modal control</subject><subject>multiple-input-multiple-output (MIMO) collocated control</subject><subject>Open loop systems</subject><subject>Robust control</subject><subject>Signal processing</subject><subject>Stability</subject><subject>Transformations</subject><subject>Vibration analysis</subject><subject>Vibration control</subject><issn>1083-4435</issn><issn>1941-014X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kE1LxDAQhoMouK7-APFSPIiXrjNN2iTHZVk_YMWDe_AW0iSVLt2mNq3gv7fdCoIHT_MOPDPDPIRcIiwQQd5tn9erx0UCkC4EYxySIzJDyTAGZG_HQwZBY8ZoekrOQtgBAEPAGWFL05WfLrJ635T1e5Tr4Gzk68g64_umGhrjq8ob3R1i3bW-Oicnha6Cu_ipc_J6v96uHuPNy8PTarmJDcvSLnZUcpECd87kmDKpTYKccQs5cyJnRuusAGmozQtTWKGFFUUmnKUgCk3pnNxMW5vWf_QudGpfBuOqStfO90ElXIpMIg7g7b8gZhxZJjMOA3r9B935vq2HJ5TI-MiJ8TBOkGl9CK0rVNOWe91-KQQ12lYH22q0rSbbw8zVNFM65355lgBNkH4DkM16sg</recordid><startdate>20050401</startdate><enddate>20050401</enddate><creator>Holterman, J.</creator><creator>de Vries, T.J.A.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SC</scope><scope>7SP</scope><scope>7TB</scope><scope>8FD</scope><scope>FR3</scope><scope>JQ2</scope><scope>L7M</scope><scope>L~C</scope><scope>L~D</scope><scope>F28</scope><scope>7U5</scope></search><sort><creationdate>20050401</creationdate><title>Active damping based on decoupled collocated control</title><author>Holterman, J. ; de Vries, T.J.A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c465t-e3978507eecb1549ac21747d0b4e8b4caa6f09c3dbfcfd8a8d8f68ed308fa33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Active damping</topic><topic>Actuators</topic><topic>Control systems</topic><topic>Damping</topic><topic>decoupled control</topic><topic>Decoupling</topic><topic>Force control</topic><topic>integral force feedback</topic><topic>Law</topic><topic>Lithography</topic><topic>Mathematical models</topic><topic>Mechanical variables control</topic><topic>micro-lithography</topic><topic>modal control</topic><topic>multiple-input-multiple-output (MIMO) collocated control</topic><topic>Open loop systems</topic><topic>Robust control</topic><topic>Signal processing</topic><topic>Stability</topic><topic>Transformations</topic><topic>Vibration analysis</topic><topic>Vibration control</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Holterman, J.</creatorcontrib><creatorcontrib>de Vries, T.J.A.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Computer and Information Systems Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Computer and Information Systems Abstracts Academic</collection><collection>Computer and Information Systems Abstracts Professional</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Solid State and Superconductivity Abstracts</collection><jtitle>IEEE/ASME transactions on mechatronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Holterman, J.</au><au>de Vries, T.J.A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Active damping based on decoupled collocated control</atitle><jtitle>IEEE/ASME transactions on mechatronics</jtitle><stitle>TMECH</stitle><date>2005-04-01</date><risdate>2005</risdate><volume>10</volume><issue>2</issue><spage>135</spage><epage>145</epage><pages>135-145</pages><issn>1083-4435</issn><eissn>1941-014X</eissn><coden>IATEFW</coden><abstract>Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge is used to obtain robust active damping. However, collocated control is inherently in terms of "local" coordinates, whereas vibration analysis is usually in terms of "modal" coordinates. Therefore, modal decoupling of the collocated control loops is required. It is shown that, under mild conditions, transformation of the control problem from local into modal coordinates yields control loops that again enable the implementation of passive and thus robustly stable control laws. The presented theory is illustrated by means of experiments on the six-degrees-of-freedom (DOF) actively controlled lens suspension within a micro-lithography machine.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TMECH.2005.844702</doi><tpages>11</tpages><oa>free_for_read</oa></addata></record> |
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| ispartof | IEEE/ASME transactions on mechatronics, 2005-04, Vol.10 (2), p.135-145 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Active damping Actuators Control systems Damping decoupled control Decoupling Force control integral force feedback Law Lithography Mathematical models Mechanical variables control micro-lithography modal control multiple-input-multiple-output (MIMO) collocated control Open loop systems Robust control Signal processing Stability Transformations Vibration analysis Vibration control |
| title | Active damping based on decoupled collocated control |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-23T00%3A31%3A29IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Active%20damping%20based%20on%20decoupled%20collocated%20control&rft.jtitle=IEEE/ASME%20transactions%20on%20mechatronics&rft.au=Holterman,%20J.&rft.date=2005-04-01&rft.volume=10&rft.issue=2&rft.spage=135&rft.epage=145&rft.pages=135-145&rft.issn=1083-4435&rft.eissn=1941-014X&rft.coden=IATEFW&rft_id=info:doi/10.1109/TMECH.2005.844702&rft_dat=%3Cproquest_RIE%3E2352154751%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=867671483&rft_id=info:pmid/&rft_ieee_id=1420321&rfr_iscdi=true |