Time evolution of electronegativity in a pulsed inductively coupled oxygen plasma

The electronegativity in a continuous wave (CW) and pulsed mode plasmas was calculated using the measured results of both the single Langmuir probe and the retarding field analyzer. For the pulsed mode measurement, both of the measurements were performed in a time-resolved method using a boxcar samp...

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Veröffentlicht in:	Thin solid films 2010-09, Vol.518 (22), p.6573-6577
Hauptverfasser:	Lee, Jeong-Beom, Seo, Sang-Hun, Chang, Hong-Young
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon plasma Density Discharges for spectral sources (including inductively coupled plasmas) Electric discharges Electronegativity Evolution Exact sciences and technology Inductively coupled plasma Oxygen plasma Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma diagnostic techniques and instrumentation Pulsed plasma Radio frequencies Retarding Sampling
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