The effects of encapsulation on deformation behavior and failure mechanisms of stretchable interconnects

In this paper, the effect of encapsulation on deformation behavior and failure mechanisms of stretchable interconnects is presented. Extensive numerical modeling is conducted for mechanical analysis of which the results are correlated with in-situ experimental observations. The numerical results rev...

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Veröffentlicht in:Thin solid films 2011-01, Vol.519 (7), p.2225-2234
Hauptverfasser: Hsu, Yung-Yu, Gonzalez, Mario, Bossuyt, Frederick, Axisa, Fabrice, Vanfleteren, Jan, De Wolf, Ingrid
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container_end_page 2234
container_issue 7
container_start_page 2225
container_title Thin solid films
container_volume 519
creator Hsu, Yung-Yu
Gonzalez, Mario
Bossuyt, Frederick
Axisa, Fabrice
Vanfleteren, Jan
De Wolf, Ingrid
description In this paper, the effect of encapsulation on deformation behavior and failure mechanisms of stretchable interconnects is presented. Extensive numerical modeling is conducted for mechanical analysis of which the results are correlated with in-situ experimental observations. The numerical results reveal that by adding an encapsulation layer of various thickness (from 0.0 to 0.5 mm) on top of the stretchable interconnect, the out-of-plane deformation and in-plane geometrical opening are reduced. Consequently, not only the plastic strain in the metal increases but also the in-plane shear stress at the interconnect/substrate interface. In-situ electromechanical experiments combined with scanning electron micrographs and optical images confirm the numerical analysis. More specifically, it is found that two failure mechanisms are involved during the stretching process: interfacial delamination in a S-shape alongside the metal conductor and metal breakdown at the crests of the metal conductor. The encapsulated stretchable interconnect shows both failure mechanisms at a lower percentage elongation than the non-encapsulated stretchable interconnect. Even so, the onset point of interfacial delamination for the encapsulated stretchable interconnect occurs only at an impressive number of 63% elongation and metal rupture only at 120%. The in-plane shear strain contour, obtained by numerical simulation, agrees well with the delamination failure location observed in the experiment.
doi_str_mv 10.1016/j.tsf.2010.10.069
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source Elsevier ScienceDirect Journals
subjects Cohesive failure
Condensed matter: structure, mechanical and thermal properties
Conductors (devices)
Deformation
Delaminating
Delamination
Elongation
Encapsulation
Exact sciences and technology
Failure mechanisms
Interfacial delamination
Physics
Stretchable device
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
title The effects of encapsulation on deformation behavior and failure mechanisms of stretchable interconnects
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