Growth and characterization of transparent conducting nanostructured zinc indium oxide thin films

Transparent conductive oxide (TCO) films have been widely used in various applications, such as for transparent electrodes in flat-panel displays, and in solar cells, optoelectronic devices, touch panels and IR reflectors. Among these, tin doped zinc oxide (ZTO) and indium doped zinc oxide (ZIO) hav...

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Veröffentlicht in:Thin solid films 2010-11, Vol.519 (3), p.1082-1086
Hauptverfasser: Jain, Vipin Kumar, Kumar, Praveen, Bhandari, Deepika, Vijay, Y.K.
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container_end_page 1086
container_issue 3
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container_title Thin solid films
container_volume 519
creator Jain, Vipin Kumar
Kumar, Praveen
Bhandari, Deepika
Vijay, Y.K.
description Transparent conductive oxide (TCO) films have been widely used in various applications, such as for transparent electrodes in flat-panel displays, and in solar cells, optoelectronic devices, touch panels and IR reflectors. Among these, tin doped zinc oxide (ZTO) and indium doped zinc oxide (ZIO) have attracted considerable attention. Particularly, IZO thin film is the best candidate for high-quality transparent conducting electrodes in OLEDs and flexible displays. In this work zinc indium oxide (ZIO) thin films were deposited on glass substrate with varying concentration (ZnO:In 2O 3 — 100:0, 90:10, 70:30 and 50:50 wt.%) at room temperature by flash evaporation technique. These deposited ZIO films were annealed in vacuum to study the thermal stability and to see the effects on the physical properties. The XRF spectra revealed the presence of zinc and indium with varying concentration in ZIO thin films, while the surface composition and oxidation state were analyzed by X-ray photoelectron spectroscopy. The core level spectra were deconvoluted to see the effect of chemical changes, while the valance band spectra manifest the electronic transitions. The surface morphology studies of the films using atomic force microscopy (AFM) revealed the formation of nanostructured ZIO thin films. The optical band gap was also found to be decreased for both types of films with increasing concentration of In 2O 3.
doi_str_mv 10.1016/j.tsf.2010.08.048
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subjects AFM
Annealing
Applied sciences
Cross-disciplinary physics: materials science
rheology
Deposition
Electrodes
Electronics
Energy
Exact sciences and technology
Flash evaporation
Indium
Indium oxides
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Nanoscale materials and structures: fabrication and characterization
Nanostructure
Natural energy
Optical band gap
Optoelectronic devices
Other topics in nanoscale materials and structures
Photovoltaic conversion
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Solar cells. Photoelectrochemical cells
Solar energy
Spectra
Theory and models of film growth
Thin films
XPS
XRF
Zinc
ZIO thin film
title Growth and characterization of transparent conducting nanostructured zinc indium oxide thin films
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