Nanogrinding of multi-layered thin film amorphous Si solar panels

Nanogrinding was performed on the cross-sections of amorphous Si thin film solar panels, which are nanoscale multi-layer structures consisting of hard and brittle materials. The deformed structures of the panel cross-sectional surfaces after grinding were investigated using electron and atomic force...

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Veröffentlicht in:	International journal of machine tools & manufacture 2011-10, Vol.51 (10), p.797-805
Hauptverfasser:	Sumitomo, Taro, Huang, Han, Zhou, Libo, Shimizu, Jun
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Applied sciences Atomic structure Deformation Exact sciences and technology Material removal Mechanical engineering. Machine design Multi-layer Multilayers Nanocomposites Nanogrinding Nanomaterials Nanostructure Panels Solar panel Thin films
Online-Zugang:	Volltext
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