Surface modification of single-crystalline diamond tool with high energy beam working

We investigated the reactivity of single-crystalline CVD diamond (100) surfaces milled using a Ga-focused ion beam (FIB) and modified by posttreatment (as-milled, vacuum heating, H2 plasma exposure) with Al, which is a standard work material for diamond tools, using an energy dispersive X-ray spectr...

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Veröffentlicht in:	Journal of the Japan Society for Abrasive Technology 2012-01, Vol.56 (1), p.40-43
Hauptverfasser:	SASAOKA, Hideki, OOKA, Masahiro, NISHIMURA, Kazuhito
Format:	Artikel
Sprache:	eng
Schlagworte:	Acceleration Aluminum Contact Diamond tools Etching Gallium Heating Single crystals
Online-Zugang:	Volltext
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