Fabrication of tapered waveguide by ashed photoresist

It is necessary to interconnect various optical components with different input or output sizes in hybrid integrated optics. Integration of optical devices on an optical printed circuit board sometimes requires a tapered waveguide to match a backbone waveguide to a smaller optical device in order to...

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Veröffentlicht in:	Microelectronic engineering 2011-08, Vol.88 (8), p.2721-2724
Hauptverfasser:	Kim, Han-Hyoung, Han, Jang-Hwan, Lee, Da-Hyeok, O, Beom-Hoan, Lee, Seung-Gol, Lee, El-Hang, Park, Se-Geun
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Ashing Backbone Circuit properties Cross sections Design. Technologies. Operation analysis. Testing Devices Electric, optical and optoelectronic circuits Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Etching Exact sciences and technology Integrated circuits Integrated optics. Optical fibers and wave guides Microelectronic fabrication (materials and surfaces technology) Molds Optical and optoelectronic circuits Photoresists Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Soft lithography Stripping Tapered waveguide Waveguides
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