Control of a Single Batch Processor With Incompatible Job Families and Future Job Arrivals

We examine the problem of minimizing the mean cycle time of a batch processor with incompatible job families and future job arrivals. Batch processors frequently found in wafer fabrication include oxidation and diffusion ovens. When the problem is deterministic with a fixed number of job arrivals, t...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2011-05, Vol.24 (2), p.208-222
Hauptverfasser:	Tajan, J B C, Sivakumar, A I, Gershwin, S B
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithm design and analysis Applied sciences Arrivals Batch processing Batch processor Batch production systems Complexity theory Correlation Cycle time Design. Technologies. Operation analysis. Testing Dynamic programming Dynamic scheduling Electronics Exact sciences and technology Heuristic Integrated circuits Integrated circuits by function (including memories and processors) Mathematical models Microelectronic fabrication (materials and surfaces technology) Microprocessors optimal control Policies Processor scheduling Program processors Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors Studies wafer fabrication
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