Microelectromechanical bandpass filters based on cyclic coupling architectures

Bandpass filters based on resonant microelectromechanical systems (MEMS) have the unique advantage of being able to leverage the benefits of classical mechanical filters, including their high quality factors of resonance, while simultaneously addressing the challenges associated with manufacturing c...

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Veröffentlicht in:	Journal of sound and vibration 2010-09, Vol.329 (20), p.4313-4332
Hauptverfasser:	Bharadwaj Chivukula, Venkata, Rhoads, Jeffrey F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Architecture Bandpass filters Design engineering Electronics Exact sciences and technology Joining Manufacturing costs Micro- and nanoelectromechanical devices (mems/nems) Microelectromechanical systems Robustness Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Vibration
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