Characterization and calibration of 2nd generation slope measuring profiler
High spectral resolution and nanometer sized foci of 3rd generation SR beamlines can only be achieved by means of ultra precise optical elements. The improved brilliance and the coherence of free electron lasers (FEL) even push the accuracy limits and make the development of a new generation of ultr...
Gespeichert in:
| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2010-05, Vol.616 (2), p.119-127 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 127 |
|---|---|
| container_issue | 2 |
| container_start_page | 119 |
| container_title | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
| container_volume | 616 |
| creator | Siewert, Frank Buchheim, Jana Zeschke, Thomas |
| description | High spectral resolution and nanometer sized foci of 3rd generation SR beamlines can only be achieved by means of ultra precise optical elements. The improved brilliance and the coherence of free electron lasers (FEL) even push the accuracy limits and make the development of a new generation of ultra precise reflective optical elements mandatory. Typical elements are wave front preserving plane mirrors (lengths of up to 1
m, residual slope errors ∼0.05
μrad (rms) and values of 0.1
nm (rms) for the micro-roughness) and curved optical elements like spheres, toroids or elliptical cylinder (residual slope error ∼0.25
μrad (rms) and better). These challenging specifications and the ongoing progress in finishing technology need to be matched by improved accuracy metrology instruments. We will discuss the results of recent developments in the field of metrology made in the BESSY-II-optics laboratory (BOL) at the Helmholtz Zentrum Berlin (HZB), by the use of vertical angle comparator (VAC) in use to calibrate the nanometer optical component measuring machine (NOM). The BESSY-NOM represents an ultra accurate type of slope measuring instruments characterized by an accuracy of 0.05
μrad (rms) for plane substrates and 0.2
μrad (rms) for significant curved surfaces. |
| doi_str_mv | 10.1016/j.nima.2009.12.033 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1671312557</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S016890020902350X</els_id><sourcerecordid>1671312557</sourcerecordid><originalsourceid>FETCH-LOGICAL-c333t-b9752519250eb62c592014dd47f8e8928a70856b5d21336b44188a90200a65c13</originalsourceid><addsrcrecordid>eNp9kE9LxDAQxYMouK5-AU89emnNJE2TgBdZ_IcLXvQc0nS6Zum2a9IK-unN0j07l2Ee780wP0KugRZAobrdFr3f2YJRqgtgBeX8hCxASZZrIatTskgmlWtK2Tm5iHFLU2mpFuR19WmDdSMG_2tHP_SZ7ZvM2c7XYZ6HNmNJ2mCPRyV2wx6zHdo4Bd9vsn0YWt9huCRnre0iXh37knw8PryvnvP129PL6n6dO875mNdaCiZAM0GxrpgTmlEom6aUrUKlmbKSKlHVomHAeVWXJShlNU3P2Uo44EtyM-9Nh78mjKPZ-eiw62yPwxQNVBI4MCFksrLZ6sIQY8DW7EMCFX4MUHMgZ7bmQM4cyBlgJpFLobs5hOmJb4_BROexd9j4gG40zeD_i_8B8ax2DA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1671312557</pqid></control><display><type>article</type><title>Characterization and calibration of 2nd generation slope measuring profiler</title><source>Elsevier ScienceDirect Journals</source><creator>Siewert, Frank ; Buchheim, Jana ; Zeschke, Thomas</creator><creatorcontrib>Siewert, Frank ; Buchheim, Jana ; Zeschke, Thomas</creatorcontrib><description>High spectral resolution and nanometer sized foci of 3rd generation SR beamlines can only be achieved by means of ultra precise optical elements. The improved brilliance and the coherence of free electron lasers (FEL) even push the accuracy limits and make the development of a new generation of ultra precise reflective optical elements mandatory. Typical elements are wave front preserving plane mirrors (lengths of up to 1
m, residual slope errors ∼0.05
μrad (rms) and values of 0.1
nm (rms) for the micro-roughness) and curved optical elements like spheres, toroids or elliptical cylinder (residual slope error ∼0.25
μrad (rms) and better). These challenging specifications and the ongoing progress in finishing technology need to be matched by improved accuracy metrology instruments. We will discuss the results of recent developments in the field of metrology made in the BESSY-II-optics laboratory (BOL) at the Helmholtz Zentrum Berlin (HZB), by the use of vertical angle comparator (VAC) in use to calibrate the nanometer optical component measuring machine (NOM). The BESSY-NOM represents an ultra accurate type of slope measuring instruments characterized by an accuracy of 0.05
μrad (rms) for plane substrates and 0.2
μrad (rms) for significant curved surfaces.</description><identifier>ISSN: 0168-9002</identifier><identifier>EISSN: 1872-9576</identifier><identifier>DOI: 10.1016/j.nima.2009.12.033</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Calibration ; Curved ; Detectors ; Errors ; Finishing ; Long trace profiler ; Measuring instruments ; Metrology ; NOM ; Planes ; Synchrotron radiation ; X-ray optics</subject><ispartof>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2010-05, Vol.616 (2), p.119-127</ispartof><rights>2009 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c333t-b9752519250eb62c592014dd47f8e8928a70856b5d21336b44188a90200a65c13</citedby><cites>FETCH-LOGICAL-c333t-b9752519250eb62c592014dd47f8e8928a70856b5d21336b44188a90200a65c13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S016890020902350X$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,27901,27902,65306</link.rule.ids></links><search><creatorcontrib>Siewert, Frank</creatorcontrib><creatorcontrib>Buchheim, Jana</creatorcontrib><creatorcontrib>Zeschke, Thomas</creatorcontrib><title>Characterization and calibration of 2nd generation slope measuring profiler</title><title>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment</title><description>High spectral resolution and nanometer sized foci of 3rd generation SR beamlines can only be achieved by means of ultra precise optical elements. The improved brilliance and the coherence of free electron lasers (FEL) even push the accuracy limits and make the development of a new generation of ultra precise reflective optical elements mandatory. Typical elements are wave front preserving plane mirrors (lengths of up to 1
m, residual slope errors ∼0.05
μrad (rms) and values of 0.1
nm (rms) for the micro-roughness) and curved optical elements like spheres, toroids or elliptical cylinder (residual slope error ∼0.25
μrad (rms) and better). These challenging specifications and the ongoing progress in finishing technology need to be matched by improved accuracy metrology instruments. We will discuss the results of recent developments in the field of metrology made in the BESSY-II-optics laboratory (BOL) at the Helmholtz Zentrum Berlin (HZB), by the use of vertical angle comparator (VAC) in use to calibrate the nanometer optical component measuring machine (NOM). The BESSY-NOM represents an ultra accurate type of slope measuring instruments characterized by an accuracy of 0.05
μrad (rms) for plane substrates and 0.2
μrad (rms) for significant curved surfaces.</description><subject>Calibration</subject><subject>Curved</subject><subject>Detectors</subject><subject>Errors</subject><subject>Finishing</subject><subject>Long trace profiler</subject><subject>Measuring instruments</subject><subject>Metrology</subject><subject>NOM</subject><subject>Planes</subject><subject>Synchrotron radiation</subject><subject>X-ray optics</subject><issn>0168-9002</issn><issn>1872-9576</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNp9kE9LxDAQxYMouK5-AU89emnNJE2TgBdZ_IcLXvQc0nS6Zum2a9IK-unN0j07l2Ee780wP0KugRZAobrdFr3f2YJRqgtgBeX8hCxASZZrIatTskgmlWtK2Tm5iHFLU2mpFuR19WmDdSMG_2tHP_SZ7ZvM2c7XYZ6HNmNJ2mCPRyV2wx6zHdo4Bd9vsn0YWt9huCRnre0iXh37knw8PryvnvP129PL6n6dO875mNdaCiZAM0GxrpgTmlEom6aUrUKlmbKSKlHVomHAeVWXJShlNU3P2Uo44EtyM-9Nh78mjKPZ-eiw62yPwxQNVBI4MCFksrLZ6sIQY8DW7EMCFX4MUHMgZ7bmQM4cyBlgJpFLobs5hOmJb4_BROexd9j4gG40zeD_i_8B8ax2DA</recordid><startdate>20100501</startdate><enddate>20100501</enddate><creator>Siewert, Frank</creator><creator>Buchheim, Jana</creator><creator>Zeschke, Thomas</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20100501</creationdate><title>Characterization and calibration of 2nd generation slope measuring profiler</title><author>Siewert, Frank ; Buchheim, Jana ; Zeschke, Thomas</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c333t-b9752519250eb62c592014dd47f8e8928a70856b5d21336b44188a90200a65c13</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Calibration</topic><topic>Curved</topic><topic>Detectors</topic><topic>Errors</topic><topic>Finishing</topic><topic>Long trace profiler</topic><topic>Measuring instruments</topic><topic>Metrology</topic><topic>NOM</topic><topic>Planes</topic><topic>Synchrotron radiation</topic><topic>X-ray optics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Siewert, Frank</creatorcontrib><creatorcontrib>Buchheim, Jana</creatorcontrib><creatorcontrib>Zeschke, Thomas</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Siewert, Frank</au><au>Buchheim, Jana</au><au>Zeschke, Thomas</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Characterization and calibration of 2nd generation slope measuring profiler</atitle><jtitle>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment</jtitle><date>2010-05-01</date><risdate>2010</risdate><volume>616</volume><issue>2</issue><spage>119</spage><epage>127</epage><pages>119-127</pages><issn>0168-9002</issn><eissn>1872-9576</eissn><abstract>High spectral resolution and nanometer sized foci of 3rd generation SR beamlines can only be achieved by means of ultra precise optical elements. The improved brilliance and the coherence of free electron lasers (FEL) even push the accuracy limits and make the development of a new generation of ultra precise reflective optical elements mandatory. Typical elements are wave front preserving plane mirrors (lengths of up to 1
m, residual slope errors ∼0.05
μrad (rms) and values of 0.1
nm (rms) for the micro-roughness) and curved optical elements like spheres, toroids or elliptical cylinder (residual slope error ∼0.25
μrad (rms) and better). These challenging specifications and the ongoing progress in finishing technology need to be matched by improved accuracy metrology instruments. We will discuss the results of recent developments in the field of metrology made in the BESSY-II-optics laboratory (BOL) at the Helmholtz Zentrum Berlin (HZB), by the use of vertical angle comparator (VAC) in use to calibrate the nanometer optical component measuring machine (NOM). The BESSY-NOM represents an ultra accurate type of slope measuring instruments characterized by an accuracy of 0.05
μrad (rms) for plane substrates and 0.2
μrad (rms) for significant curved surfaces.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.nima.2009.12.033</doi><tpages>9</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0168-9002 |
| ispartof | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2010-05, Vol.616 (2), p.119-127 |
| issn | 0168-9002 1872-9576 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1671312557 |
| source | Elsevier ScienceDirect Journals |
| subjects | Calibration Curved Detectors Errors Finishing Long trace profiler Measuring instruments Metrology NOM Planes Synchrotron radiation X-ray optics |
| title | Characterization and calibration of 2nd generation slope measuring profiler |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-01T09%3A01%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Characterization%20and%20calibration%20of%202nd%20generation%20slope%20measuring%20profiler&rft.jtitle=Nuclear%20instruments%20&%20methods%20in%20physics%20research.%20Section%20A,%20Accelerators,%20spectrometers,%20detectors%20and%20associated%20equipment&rft.au=Siewert,%20Frank&rft.date=2010-05-01&rft.volume=616&rft.issue=2&rft.spage=119&rft.epage=127&rft.pages=119-127&rft.issn=0168-9002&rft.eissn=1872-9576&rft_id=info:doi/10.1016/j.nima.2009.12.033&rft_dat=%3Cproquest_cross%3E1671312557%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1671312557&rft_id=info:pmid/&rft_els_id=S016890020902350X&rfr_iscdi=true |