Experiment study on micro-structure on different crystallographic planes of mc-Si etched in alkaline solution

The investigation of multi-crystalline silicon (mc-Si) surface etching technology is a key point in solar cell research. In this paper, mc-Si surface was etched in the common alkaline solution modified by an additive for 20 minutes at 78-80~C. Samples' surface morphology was observed by scanning ele...

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Veröffentlicht in:Science China. Technological sciences 2012-06, Vol.55 (6), p.1509-1514
Hauptverfasser: Wang, KunXia, Feng, ShiMeng, Xu, HuaTian, Tian, JiaTong, Yang, ShuQuan, Huang, JianHua, Pei, Jun
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container_issue 6
container_start_page 1509
container_title Science China. Technological sciences
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creator Wang, KunXia
Feng, ShiMeng
Xu, HuaTian
Tian, JiaTong
Yang, ShuQuan
Huang, JianHua
Pei, Jun
description The investigation of multi-crystalline silicon (mc-Si) surface etching technology is a key point in solar cell research. In this paper, mc-Si surface was etched in the common alkaline solution modified by an additive for 20 minutes at 78-80~C. Samples' surface morphology was observed by scanning electron microscope (SEM). It is firstly found that the etched mc-Si surface has the uniform distribution of trap pits although the morphologies of trap pits are slightly different on different crystallographic planes. Si (100) plane was covered with many small Si-mountaln ranges or long V-shape channels arranged in a crisscross pat- tern. For (110) plane and (111) plane, they were full of a lot of triangle pit-traps (or quadrilateral holes) and twisted earthworm trap pits, respectively. The measured reflectance of the sample was 20.5% at wavelength range of 400--900 nm. These results illustrate that alkaline solution modified by an additive can effectively etch out trap pits with a good trapping light effect on mc-Si surfaces. This method should be very valuable for mc-Si solar cells.
doi_str_mv 10.1007/s11431-012-4807-8
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subjects Additives
Crystallography
Engineering
Etching
Morphology
Pits
Planes
Scanning electron microscopy
Si表面
Solar cells
太阳能电池
实验
微结构
扫描电子显微镜
晶面
碱性溶液
蚀刻技术
title Experiment study on micro-structure on different crystallographic planes of mc-Si etched in alkaline solution
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