Optical microcavities fabricated by DBR overgrowth of pyramidal-shaped GaAs mesas

Optical cavities have been fabricated by overgrowth of truncated GaAs pyramids with a distributed Bragg reflector. The success of this overgrowth depends strongly on the crystallographic orientation of the pyramid facets and shows best results for { 1 1 4 } A facets. In order to fabricate mesas with...

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Veröffentlicht in:Journal of crystal growth 2011-06, Vol.324 (1), p.259-262
Hauptverfasser: Rülke, D., Karl, M., Hu, D.Z., Schaadt, D.M., Kalt, H., Hetterich, M.
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container_end_page 262
container_issue 1
container_start_page 259
container_title Journal of crystal growth
container_volume 324
creator Rülke, D.
Karl, M.
Hu, D.Z.
Schaadt, D.M.
Kalt, H.
Hetterich, M.
description Optical cavities have been fabricated by overgrowth of truncated GaAs pyramids with a distributed Bragg reflector. The success of this overgrowth depends strongly on the crystallographic orientation of the pyramid facets and shows best results for { 1 1 4 } A facets. In order to fabricate mesas with precisely such facets, a wet-chemical etching process including several selective etching steps has been established. To determine the optical properties of these resonators, InAs quantum dots have been used as an internal broad-band light source. The quality factors for optical modes have been determined to range up to 8000 and show a dependency on cavity width.
doi_str_mv 10.1016/j.jcrysgro.2011.03.041
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subjects A1. Etching
A1. Nanostructures
A1. Optical microscopy
A3. Molecular beam epitaxy
B1. Arsenates
B2. Semiconducting III–V materials
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Etching
Exact sciences and technology
Gallium arsenide
Gallium arsenides
Holes
Materials science
Mesas
Microcavities
Nanoscale materials and structures: fabrication and characterization
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Other topics in nanoscale materials and structures
Physics
Pyramids
Quantum dots
Structure of solids and liquids
crystallography
Structure of specific crystalline solids
title Optical microcavities fabricated by DBR overgrowth of pyramidal-shaped GaAs mesas
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