Plasma Characteristics of a Ni–Zn Ferrite Enhanced Internal-Type Inductively Coupled Plasma Source Operated at 2 and 13.56 MHz

Plasma and electrical characteristics of an internal-type inductively coupled plasma source with a Ni–Zn ferrite module installed near the antenna were investigated for different rf power frequencies of 2 and 13.56 MHz. Due to the lower heating of the Ni–Zn ferrite module on the antenna for the oper...

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Veröffentlicht in:	Plasma chemistry and plasma processing 2010-02, Vol.30 (1), p.183-190
Hauptverfasser:	Kim, Kyong Nam, Lim, Jong Hyeuk, Yeom, Geun Young
Format:	Artikel
Sprache:	eng
Schlagworte:	Antennas Characterization and Evaluation of Materials Chemistry Chemistry and Materials Science Classical Mechanics Etching Ferrite Inductively coupled plasma Inorganic Chemistry Mechanical Engineering Nickel Original Paper Photoresists Plasma density Variability
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