Direct FIB fabrication and integration of “single nanopore devices” for the manipulation of macromolecules

Single nanopores in thin solid state membranes have become a useful tool for single biomolecule analysis during the recent years. The molecule to be analyzed is drawn through the electrolyte filled pore by an electric field, yielding a characteristic current blockade during its passage. We present here a FIB processing technique able to produce such pores in thin (20–50 nm) dielectric films in the deep sub-10 nm range in relatively large quantities and allowing further functionalization of the vicinity of the pore. Integration of these pores in electrophoresis experiments and first translocation measurements of DNA, Fibronectin and colloidal particles are also shown.