A Non-Contact-Type RF MEMS Switch for 24-GHz Radar Applications

This paper presents the design, fabrication, and measurement results for a novel non-contact-type radio-frequency (RF) microelectromechanical systems switch for 24-GHz radar applications. The proposed switches are free from unavoidable microwelding and stiction problems in other contact types, which...

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Veröffentlicht in:	Journal of microelectromechanical systems 2009-02, Vol.18 (1), p.163-173
Hauptverfasser:	Jaehong Park, Shim, E.S., Wooyeol Choi, Youngmin Kim, Youngwoo Kwon, Dong-il Cho
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Applied sciences Capacitance Circuit properties Contacts Design engineering Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fabrication General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Insulation Mechanical instruments, equipment and techniques Microelectromechanical systems Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Noise levels Non-contact-type Physics Radar Radar applications Radio frequencies Radio frequency radio-frequency (RF) microelectromechanical systems (MEMS) switch Radiofrequency microelectromechanical systems sacrificial bulk micromachining (SBM) process selective silicon-on-insulator (SSOI) process Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Switches Transducers variable capacitors
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