Evaluation of Thermoelectric Performance of Diamond Like Carbon Thin Films Prepared by RF Plasma CVD

This paper presents an investigation of the thermoelectric performance of DLC films deposited on glass substrates using RF plasma CVD method. The respective thermoelectric performances of Si-doped DLC film and non-Si doped DLC film were evaluated and compared. The DLC films showed a Seebeck effect,...

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Veröffentlicht in:	Hyōmen gijutsu 2010/04/01, Vol.61(4), pp.325-325
Hauptverfasser:	NAKAMURA, Masashi, HARAGUCHI, Tadao, UCHIYAMA, Satoshi
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Chemical vapor deposition Deposition Diamond Like Carbon Diamond-like carbon films Electrical resistivity P-type semiconductors Radio frequencies RF Plasma CVD Semiconductor Thermoelectric materials Thermoelectric Performance Thermoelectricity Thin films
Online-Zugang:	Volltext
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