Diamond synthesis from CH sub(4)-H sub(2)-O sub(2) reaction gas using microwave plasma CVD

Synthesis of diamond using mode-translation type microwave plasma CVD from a CH sub(4)-H sub(2)-O sub(2) reaction gas system was investigated. Diamond could not be synthesized by addition of O sub(2) at low CH sub(4) flow rate. On the other hand, diamond could be synthesized by addition of small amo...

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Veröffentlicht in:	Journal of the Japan Society for Abrasive Technology 2007-01, Vol.51 (12), p.735-740
Hauptverfasser:	Takami, Yoshihito, Sakamoto, Yukihiro, Takaya, Matsufumi
Format:	Artikel
Sprache:	eng
Schlagworte:	Abrasives Chemical vapor deposition Deposition Flow rate Microwave plasmas Synthesis
Online-Zugang:	Volltext
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