Active-Matrix Amorphous-Silicon TFTs Arrays at 180 on Clear Plastic and Glass Substrates for Organic Light-Emitting Displays
An amorphous-silicon thin-film transistor (TFT) process with a 180 degC maximum temperature using plasma-enhanced chemical vapor deposition has been developed on both novel clear polymer and glass substrates. The gate leakage current, threshold voltage, mobility, and on/off ratio of the TFTs are com...
Gespeichert in:
| Veröffentlicht in: | IEEE transactions on electron devices 2006-08, Vol.53 (8), p.1789 |
|---|---|
| Hauptverfasser: | , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | 8 |
| container_start_page | 1789 |
| container_title | IEEE transactions on electron devices |
| container_volume | 53 |
| creator | Long, K Kattamis, A.Z Cheng, I.-C Gleskova, H Wagner, S Sturm, J.C Stevenson, M Yu, G O'Regan, M |
| description | An amorphous-silicon thin-film transistor (TFT) process with a 180 degC maximum temperature using plasma-enhanced chemical vapor deposition has been developed on both novel clear polymer and glass substrates. The gate leakage current, threshold voltage, mobility, and on/off ratio of the TFTs are comparable with those of standard TFTs on glass with deposition temperature of 300 degC-350 degC. Active-matrix pixel circuits for organic light-emitting displays (LEDs) on both glass and clear plastic substrates were fabricated with these TFTs. Leakage current in the switching TFT is low enough to allow data storage for video graphics array timings. The pixels provide suitable drive current for bright displays at a modest drive voltage. Test active matrices with integrated polymer LEDs on glass showed good pixel uniformity, behaved electrically as expected for the TFT characteristics, and were as bright as 1500 cd/m super(2) |
| doi_str_mv | 10.1109/TED.2006.878028 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest</sourceid><recordid>TN_cdi_proquest_miscellaneous_1671231413</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1671231413</sourcerecordid><originalsourceid>FETCH-LOGICAL-p603-2710de6489ceacc4a0e90e8f48c9d427e395348a96f73f132e980f2fd35a17773</originalsourceid><addsrcrecordid>eNpdj0tLAzEURoMoWKtrt8GVm9S8Jo_lUNsqVCp09iVmMm3KdGZMMqLgjzegK1f3ux-Hw70A3BI8IwTrh2rxOKMYi5mSClN1BiakKCTSgotzMMGYKKSZYpfgKsZjXgXndAK-S5v8h0MvJgX_CctTH4ZDP0a09a23fQerZRVhGYL5itAkSBSGuZ23zgT42pqYvIWmq-Eq5wi341tMwSQXYdMHuAl702Vg7feHhBYnn5Lv9vDRx6HNwmtw0Zg2upu_OQXVclHNn9B6s3qel2s0CMwQlQTXTnClrTPWcoOdxk41XFldcyod0wXjymjRSNYQRp1WuKFNzQpDpJRsCu5_tUPo30cX0-7ko3VtazqXX90RIQllhBOW0bt_6LEfQ5eP2ymNsdSSSvYDSKpspw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>890079727</pqid></control><display><type>article</type><title>Active-Matrix Amorphous-Silicon TFTs Arrays at 180 on Clear Plastic and Glass Substrates for Organic Light-Emitting Displays</title><source>IEEE Electronic Library (IEL)</source><creator>Long, K ; Kattamis, A.Z ; Cheng, I.-C ; Gleskova, H ; Wagner, S ; Sturm, J.C ; Stevenson, M ; Yu, G ; O'Regan, M</creator><creatorcontrib>Long, K ; Kattamis, A.Z ; Cheng, I.-C ; Gleskova, H ; Wagner, S ; Sturm, J.C ; Stevenson, M ; Yu, G ; O'Regan, M</creatorcontrib><description>An amorphous-silicon thin-film transistor (TFT) process with a 180 degC maximum temperature using plasma-enhanced chemical vapor deposition has been developed on both novel clear polymer and glass substrates. The gate leakage current, threshold voltage, mobility, and on/off ratio of the TFTs are comparable with those of standard TFTs on glass with deposition temperature of 300 degC-350 degC. Active-matrix pixel circuits for organic light-emitting displays (LEDs) on both glass and clear plastic substrates were fabricated with these TFTs. Leakage current in the switching TFT is low enough to allow data storage for video graphics array timings. The pixels provide suitable drive current for bright displays at a modest drive voltage. Test active matrices with integrated polymer LEDs on glass showed good pixel uniformity, behaved electrically as expected for the TFT characteristics, and were as bright as 1500 cd/m super(2)</description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2006.878028</identifier><language>eng</language><publisher>New York: The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</publisher><subject>Arrays ; Displays ; Glass ; Leakage current ; Pixels ; Semiconductor devices ; Thin film transistors ; Threshold voltage</subject><ispartof>IEEE transactions on electron devices, 2006-08, Vol.53 (8), p.1789</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2006</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Long, K</creatorcontrib><creatorcontrib>Kattamis, A.Z</creatorcontrib><creatorcontrib>Cheng, I.-C</creatorcontrib><creatorcontrib>Gleskova, H</creatorcontrib><creatorcontrib>Wagner, S</creatorcontrib><creatorcontrib>Sturm, J.C</creatorcontrib><creatorcontrib>Stevenson, M</creatorcontrib><creatorcontrib>Yu, G</creatorcontrib><creatorcontrib>O'Regan, M</creatorcontrib><title>Active-Matrix Amorphous-Silicon TFTs Arrays at 180 on Clear Plastic and Glass Substrates for Organic Light-Emitting Displays</title><title>IEEE transactions on electron devices</title><description>An amorphous-silicon thin-film transistor (TFT) process with a 180 degC maximum temperature using plasma-enhanced chemical vapor deposition has been developed on both novel clear polymer and glass substrates. The gate leakage current, threshold voltage, mobility, and on/off ratio of the TFTs are comparable with those of standard TFTs on glass with deposition temperature of 300 degC-350 degC. Active-matrix pixel circuits for organic light-emitting displays (LEDs) on both glass and clear plastic substrates were fabricated with these TFTs. Leakage current in the switching TFT is low enough to allow data storage for video graphics array timings. The pixels provide suitable drive current for bright displays at a modest drive voltage. Test active matrices with integrated polymer LEDs on glass showed good pixel uniformity, behaved electrically as expected for the TFT characteristics, and were as bright as 1500 cd/m super(2)</description><subject>Arrays</subject><subject>Displays</subject><subject>Glass</subject><subject>Leakage current</subject><subject>Pixels</subject><subject>Semiconductor devices</subject><subject>Thin film transistors</subject><subject>Threshold voltage</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNpdj0tLAzEURoMoWKtrt8GVm9S8Jo_lUNsqVCp09iVmMm3KdGZMMqLgjzegK1f3ux-Hw70A3BI8IwTrh2rxOKMYi5mSClN1BiakKCTSgotzMMGYKKSZYpfgKsZjXgXndAK-S5v8h0MvJgX_CctTH4ZDP0a09a23fQerZRVhGYL5itAkSBSGuZ23zgT42pqYvIWmq-Eq5wi341tMwSQXYdMHuAl702Vg7feHhBYnn5Lv9vDRx6HNwmtw0Zg2upu_OQXVclHNn9B6s3qel2s0CMwQlQTXTnClrTPWcoOdxk41XFldcyod0wXjymjRSNYQRp1WuKFNzQpDpJRsCu5_tUPo30cX0-7ko3VtazqXX90RIQllhBOW0bt_6LEfQ5eP2ymNsdSSSvYDSKpspw</recordid><startdate>20060801</startdate><enddate>20060801</enddate><creator>Long, K</creator><creator>Kattamis, A.Z</creator><creator>Cheng, I.-C</creator><creator>Gleskova, H</creator><creator>Wagner, S</creator><creator>Sturm, J.C</creator><creator>Stevenson, M</creator><creator>Yu, G</creator><creator>O'Regan, M</creator><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20060801</creationdate><title>Active-Matrix Amorphous-Silicon TFTs Arrays at 180 on Clear Plastic and Glass Substrates for Organic Light-Emitting Displays</title><author>Long, K ; Kattamis, A.Z ; Cheng, I.-C ; Gleskova, H ; Wagner, S ; Sturm, J.C ; Stevenson, M ; Yu, G ; O'Regan, M</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p603-2710de6489ceacc4a0e90e8f48c9d427e395348a96f73f132e980f2fd35a17773</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Arrays</topic><topic>Displays</topic><topic>Glass</topic><topic>Leakage current</topic><topic>Pixels</topic><topic>Semiconductor devices</topic><topic>Thin film transistors</topic><topic>Threshold voltage</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Long, K</creatorcontrib><creatorcontrib>Kattamis, A.Z</creatorcontrib><creatorcontrib>Cheng, I.-C</creatorcontrib><creatorcontrib>Gleskova, H</creatorcontrib><creatorcontrib>Wagner, S</creatorcontrib><creatorcontrib>Sturm, J.C</creatorcontrib><creatorcontrib>Stevenson, M</creatorcontrib><creatorcontrib>Yu, G</creatorcontrib><creatorcontrib>O'Regan, M</creatorcontrib><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on electron devices</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Long, K</au><au>Kattamis, A.Z</au><au>Cheng, I.-C</au><au>Gleskova, H</au><au>Wagner, S</au><au>Sturm, J.C</au><au>Stevenson, M</au><au>Yu, G</au><au>O'Regan, M</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Active-Matrix Amorphous-Silicon TFTs Arrays at 180 on Clear Plastic and Glass Substrates for Organic Light-Emitting Displays</atitle><jtitle>IEEE transactions on electron devices</jtitle><date>2006-08-01</date><risdate>2006</risdate><volume>53</volume><issue>8</issue><spage>1789</spage><pages>1789-</pages><issn>0018-9383</issn><eissn>1557-9646</eissn><abstract>An amorphous-silicon thin-film transistor (TFT) process with a 180 degC maximum temperature using plasma-enhanced chemical vapor deposition has been developed on both novel clear polymer and glass substrates. The gate leakage current, threshold voltage, mobility, and on/off ratio of the TFTs are comparable with those of standard TFTs on glass with deposition temperature of 300 degC-350 degC. Active-matrix pixel circuits for organic light-emitting displays (LEDs) on both glass and clear plastic substrates were fabricated with these TFTs. Leakage current in the switching TFT is low enough to allow data storage for video graphics array timings. The pixels provide suitable drive current for bright displays at a modest drive voltage. Test active matrices with integrated polymer LEDs on glass showed good pixel uniformity, behaved electrically as expected for the TFT characteristics, and were as bright as 1500 cd/m super(2)</abstract><cop>New York</cop><pub>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</pub><doi>10.1109/TED.2006.878028</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0018-9383 |
| ispartof | IEEE transactions on electron devices, 2006-08, Vol.53 (8), p.1789 |
| issn | 0018-9383 1557-9646 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1671231413 |
| source | IEEE Electronic Library (IEL) |
| subjects | Arrays Displays Glass Leakage current Pixels Semiconductor devices Thin film transistors Threshold voltage |
| title | Active-Matrix Amorphous-Silicon TFTs Arrays at 180 on Clear Plastic and Glass Substrates for Organic Light-Emitting Displays |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-02T10%3A50%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Active-Matrix%20Amorphous-Silicon%20TFTs%20Arrays%20at%20180%20on%20Clear%20Plastic%20and%20Glass%20Substrates%20for%20Organic%20Light-Emitting%20Displays&rft.jtitle=IEEE%20transactions%20on%20electron%20devices&rft.au=Long,%20K&rft.date=2006-08-01&rft.volume=53&rft.issue=8&rft.spage=1789&rft.pages=1789-&rft.issn=0018-9383&rft.eissn=1557-9646&rft_id=info:doi/10.1109/TED.2006.878028&rft_dat=%3Cproquest%3E1671231413%3C/proquest%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=890079727&rft_id=info:pmid/&rfr_iscdi=true |