Magnetic, Mechanical, and Optical Characterization of a Magnetic Nanoparticle-Embedded Polymer for Microactuation

We have characterized the magnetic, mechanical, and optical properties of SU-8 polymer with embedded nickel nanoparticles (SU8-Ni) of concentrations ranging from 0% to 12.5% Ni by weight. Magnetic characterization was performed using a micropolysilicon torsional actuator as well as via alternating g...

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Veröffentlicht in:Journal of microelectromechanical systems 2011-02, Vol.20 (1), p.65-72
Hauptverfasser: Tsai, K L, Ziaei-Moayyed, M, Candler, R N, Wei Hu, Brand, V, Klejwa, N, Wang, S X, Howe, R T
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Sprache:eng
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Zusammenfassung:We have characterized the magnetic, mechanical, and optical properties of SU-8 polymer with embedded nickel nanoparticles (SU8-Ni) of concentrations ranging from 0% to 12.5% Ni by weight. Magnetic characterization was performed using a micropolysilicon torsional actuator as well as via alternating gradient magnetometry. Mechanical properties were measured using nanoindentation, and optical measurements were acquired via spectrophotometry. This magnetic polymer offers several advantages as a micromechanical structural material, including biocompatibility, chemical resistance, thermal stability, low cost, and mechanical compliance for large deflections. It is suitable for fluidics and biomedical applications where remote low-power actuation is desired.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2010.2093560