Fabrication of a double-sided micro-lens array by a glass molding technique

In recent years, micro-lens arrays (MLAs) have become important elements of optical systems. One function of MLAs is to create a uniform intensity of light. Compared with one-sided MLAs, the uniformity of light intensity increases with double-sided MLAs. MLAs fabricated by glass can be used in highe...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2011-08, Vol.21 (8), p.85020-6
Hauptverfasser:	HUANG, Chien-Yao, HSIAO, Wen-Tse, HUANG, Kuo-Cheng, CHANG, Keng-Souo, CHOU, Hsiao-Yu, CHOU, Chang-Pin
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Arrays Building materials. Ceramics. Glasses Chemical industry and chemicals Circuit properties Diamond machining Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Glass Glasses Laser machining Manufacture Mechanical engineering. Machine design Microelectronic fabrication (materials and surfaces technology) Micromachining Molding (process) Molds Optical and optoelectronic circuits Photolithography Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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