Development of a peristaltic gas micropump with a single chamber and multiple electrodes

This paper reports on the development of a multi-electrode electrostatically driven peristaltic gas micropump. The micropump consists of a single chamber and a flexible diaphragm with a multi-electrode pattern. The single-chamber design is divided into smaller cells by the electrodes; the characteri...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2013-09, Vol.23 (9), p.95006-8
Hauptverfasser:	Lee, K S, Kim, B, Shannon, M A
Format:	Artikel
Sprache:	eng
Schlagworte:	Chambers Diaphragms Electrodes electrostatic Exact sciences and technology Flow rate gas micropump General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Microengineering Micromechanics Micropumps multi-electrodes peristaltic Physics Transducers
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container_title	Journal of micromechanics and microengineering
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creator	Lee, K S Kim, B Shannon, M A
description	This paper reports on the development of a multi-electrode electrostatically driven peristaltic gas micropump. The micropump consists of a single chamber and a flexible diaphragm with a multi-electrode pattern. The single-chamber design is divided into smaller cells by the electrodes; the characteristic operating frequency of the micropump increases as the number of electrodes increases. The flow rate is also observed to increase to maximum before decreasing for larger numbers of electrodes. Whereas the maximum flow rate of a 4-electrode micropump is about 40 µl min−1 at 14 Hz, the maximum flow rate of the 16-electrode micropump is about 250 µl min−1 at 1400 Hz and that of the 32-electrode micropump is 150 µl min−1 at 4000 Hz.
doi_str_mv	10.1088/0960-1317/23/9/095006
format	Article
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The micropump consists of a single chamber and a flexible diaphragm with a multi-electrode pattern. The single-chamber design is divided into smaller cells by the electrodes; the characteristic operating frequency of the micropump increases as the number of electrodes increases. The flow rate is also observed to increase to maximum before decreasing for larger numbers of electrodes. Whereas the maximum flow rate of a 4-electrode micropump is about 40 µl min−1 at 14 Hz, the maximum flow rate of the 16-electrode micropump is about 250 µl min−1 at 1400 Hz and that of the 32-electrode micropump is 150 µl min−1 at 4000 Hz.</description><identifier>ISSN: 0960-1317</identifier><identifier>EISSN: 1361-6439</identifier><identifier>DOI: 10.1088/0960-1317/23/9/095006</identifier><identifier>CODEN: JMMIEZ</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Chambers ; Diaphragms ; Electrodes ; electrostatic ; Exact sciences and technology ; Flow rate ; gas micropump ; General equipment and techniques ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Microengineering ; Micromechanics ; Micropumps ; multi-electrodes ; peristaltic ; Physics ; Transducers</subject><ispartof>Journal of micromechanics and microengineering, 2013-09, Vol.23 (9), p.95006-8</ispartof><rights>2013 IOP Publishing Ltd</rights><rights>2014 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c358t-da047bfa847fa64fc357d4a3bb549cbae0a3154e3d9cef7459ddc0651661dd3e3</citedby><cites>FETCH-LOGICAL-c358t-da047bfa847fa64fc357d4a3bb549cbae0a3154e3d9cef7459ddc0651661dd3e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/0960-1317/23/9/095006/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53846,53893</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27749779$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Lee, K S</creatorcontrib><creatorcontrib>Kim, B</creatorcontrib><creatorcontrib>Shannon, M A</creatorcontrib><title>Development of a peristaltic gas micropump with a single chamber and multiple electrodes</title><title>Journal of micromechanics and microengineering</title><addtitle>JMM</addtitle><addtitle>J. Micromech. Microeng</addtitle><description>This paper reports on the development of a multi-electrode electrostatically driven peristaltic gas micropump. The micropump consists of a single chamber and a flexible diaphragm with a multi-electrode pattern. The single-chamber design is divided into smaller cells by the electrodes; the characteristic operating frequency of the micropump increases as the number of electrodes increases. The flow rate is also observed to increase to maximum before decreasing for larger numbers of electrodes. Whereas the maximum flow rate of a 4-electrode micropump is about 40 µl min−1 at 14 Hz, the maximum flow rate of the 16-electrode micropump is about 250 µl min−1 at 1400 Hz and that of the 32-electrode micropump is 150 µl min−1 at 4000 Hz.</description><subject>Chambers</subject><subject>Diaphragms</subject><subject>Electrodes</subject><subject>electrostatic</subject><subject>Exact sciences and technology</subject><subject>Flow rate</subject><subject>gas micropump</subject><subject>General equipment and techniques</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Microengineering</subject><subject>Micromechanics</subject><subject>Micropumps</subject><subject>multi-electrodes</subject><subject>peristaltic</subject><subject>Physics</subject><subject>Transducers</subject><issn>0960-1317</issn><issn>1361-6439</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqFkEtLAzEUhYMoWB8_QchGcDM2aTKTyVLqEwQ3Cu7CneROmzIvkxnFf29KS7euLvfynXM5h5Arzm45K8s50wXLuOBqvhBzndacseKIzLgoeFZIoY_J7MCckrMYN4xxXvJyRj7v8RubfmixG2lfU6ADBh9HaEZv6Qoibb0N_TC1A_3x4zoB0XerBqldQ1thoNA52k4JH9IRG7Rj6B3GC3JSQxPxcj_Pycfjw_vyOXt9e3pZ3r1mVuTlmDlgUlU1lFLVUMg6XZWTIKoql9pWgAwEzyUKpy3WSubaOcuKnBcFd06gOCc3O98h9F8TxtG0PlpsGuiwn6JJoNZ8obhKaL5DU6AYA9ZmCL6F8Gs4M9smzbYls23JLITRZtdk0l3vX0C00NQBOuvjQbxQSmqldOL4jvP9YDb9FLoU_B_vP7xxg2E</recordid><startdate>20130901</startdate><enddate>20130901</enddate><creator>Lee, K S</creator><creator>Kim, B</creator><creator>Shannon, M A</creator><general>IOP Publishing</general><general>Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope></search><sort><creationdate>20130901</creationdate><title>Development of a peristaltic gas micropump with a single chamber and multiple electrodes</title><author>Lee, K S ; Kim, B ; Shannon, M A</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c358t-da047bfa847fa64fc357d4a3bb549cbae0a3154e3d9cef7459ddc0651661dd3e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Chambers</topic><topic>Diaphragms</topic><topic>Electrodes</topic><topic>electrostatic</topic><topic>Exact sciences and technology</topic><topic>Flow rate</topic><topic>gas micropump</topic><topic>General equipment and techniques</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Microengineering</topic><topic>Micromechanics</topic><topic>Micropumps</topic><topic>multi-electrodes</topic><topic>peristaltic</topic><topic>Physics</topic><topic>Transducers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lee, K S</creatorcontrib><creatorcontrib>Kim, B</creatorcontrib><creatorcontrib>Shannon, M A</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of micromechanics and microengineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lee, K S</au><au>Kim, B</au><au>Shannon, M A</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Development of a peristaltic gas micropump with a single chamber and multiple electrodes</atitle><jtitle>Journal of micromechanics and microengineering</jtitle><stitle>JMM</stitle><addtitle>J. Micromech. Microeng</addtitle><date>2013-09-01</date><risdate>2013</risdate><volume>23</volume><issue>9</issue><spage>95006</spage><epage>8</epage><pages>95006-8</pages><issn>0960-1317</issn><eissn>1361-6439</eissn><coden>JMMIEZ</coden><abstract>This paper reports on the development of a multi-electrode electrostatically driven peristaltic gas micropump. The micropump consists of a single chamber and a flexible diaphragm with a multi-electrode pattern. The single-chamber design is divided into smaller cells by the electrodes; the characteristic operating frequency of the micropump increases as the number of electrodes increases. The flow rate is also observed to increase to maximum before decreasing for larger numbers of electrodes. Whereas the maximum flow rate of a 4-electrode micropump is about 40 µl min−1 at 14 Hz, the maximum flow rate of the 16-electrode micropump is about 250 µl min−1 at 1400 Hz and that of the 32-electrode micropump is 150 µl min−1 at 4000 Hz.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/0960-1317/23/9/095006</doi><tpages>8</tpages></addata></record>
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subjects	Chambers Diaphragms Electrodes electrostatic Exact sciences and technology Flow rate gas micropump General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Microengineering Micromechanics Micropumps multi-electrodes peristaltic Physics Transducers
title	Development of a peristaltic gas micropump with a single chamber and multiple electrodes
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