Design of a four-degree-of-freedom nano positioner utilizing electromagnetic actuators and flexure mechanisms

Positioning devices are widely used in industrial applications. High precision is a key performance of the positioner and recently high precision positioners for advanced applications are required to satisfy other performances such as larger motion range, nanometer level precision, and multiple degr...

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Veröffentlicht in:	Review of scientific instruments 2015-03, Vol.86 (3), p.035101-035101
Hauptverfasser:	Ahn, Dahoon, Choi, Young-Man, Jeong, Jaehwa
Format:	Artikel
Sprache:	eng
Schlagworte:	Degrees of freedom Design optimization Design parameters Feedback control Flexing Industrial applications Motors Positioning devices (machinery) Product design Scientific apparatus & instruments
Online-Zugang:	Volltext
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