The microstructural and thickness uniformity of zirconia coatings produced by r.f. ion plating

An ion plating system, which utilizes r.f. substrate biasing, was studied to determine the influence of source to substrate distance on the microstructure and thickness uniformity of zirconia coatings. Coating thickness measurements were used to evaluate parameters from equations which describe unif...

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Veröffentlicht in:	Materials science & engineering. A, Structural materials : properties, microstructure and processing Structural materials : properties, microstructure and processing, 1993-01, Vol.163 (2), p.171-175
Hauptverfasser:	Fancey, K.S., Young, S.J., James, A.S., Matthews, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Exact sciences and technology Metals. Metallurgy Nonmetallic coatings Production techniques Surface treatment
Online-Zugang:	Volltext
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