The influence of Si concentrations on the oxidation resistance of Mo-Si-B-(N) coatings

The influence of the silicon concentration on the oxidation resistance of Mo-Si-B-N coatings prepared by magnetron sputtering is investigated. The Si content in them was controlled by the composite-target composition, as well as by various areas of silicon segments placed into the target-erosion zon...

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Veröffentlicht in:Russian journal of non-ferrous metals 2014-11, Vol.55 (6), p.645-651
Hauptverfasser: Kiryukhantsev-Korneev, Ph. V., Andreev, S. O., Shvyndina, N. V., Levashov, E. A., Timofeev, A. N., Shtansky, D. V.
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container_title Russian journal of non-ferrous metals
container_volume 55
creator Kiryukhantsev-Korneev, Ph. V.
Andreev, S. O.
Shvyndina, N. V.
Levashov, E. A.
Timofeev, A. N.
Shtansky, D. V.
description The influence of the silicon concentration on the oxidation resistance of Mo-Si-B-N coatings prepared by magnetron sputtering is investigated. The Si content in them was controlled by the composite-target composition, as well as by various areas of silicon segments placed into the target-erosion zone. The composition and structure of coatings after deposition and annealing in air at temperatures of 500–1300°C are investigated using transmission and scanning electron microscopy, energy-dispersive analysis, and glow-discharge optical emission spectroscopy. It is established that oxidation resistance increases as the Si concentration in coatings increases, which is caused by the formation of a silicon oxide-based dense layer; this layer prevents oxygen propagation into the coating depth upon heating. The maximal oxidation resistance at a level of 1300°C is attained in Mo-Si-B-N coatings containing 40 at % Si.
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1934-970X
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source SpringerNature Complete Journals
subjects Chemistry and Materials Science
Coatings
Concentration (composition)
Deposition
Materials Science
Metallic Materials
Molybdenum
Nanostructured Materials and Functional Coatings
Nonferrous metals
Optical emission spectroscopy
Oxidation resistance
Segments
Silicon
title The influence of Si concentrations on the oxidation resistance of Mo-Si-B-(N) coatings
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