Structural evolution and defect control of yttrium-doped ZrO2 films grown by a sol–gel method

•Yttrium-doped ZrO2 thin-films can be synthesized via the sol–gel method at low temperatures.•The interfacial states can be effectively reduced through yttrium doping into ZrO2 using the sol–gel process.•Yttrium doping of ZrO2 changes the level of interfacial states originating from oxygen vacancies...

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