Quantitative analysis of Cu(In,Ga)Se sub( 2) thin films by secondary ion mass spectrometry using a total number counting method

The relative atomic fraction of Cu(In,Ga)Se... (CIGS) films is one of the most important measurements for the fabrication of CIGS thin film solar cells. However, the quantitative analysis of multi-element alloy films is difficult by surface analysis methods due to the severe matrix effect. In this s...

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Veröffentlicht in:Metrologia 2012-08, Vol.49 (4), p.522-522
Hauptverfasser: Jang, Jong Shik, Hwang, Hye Hyen, Kang, Hee Jae, Suh, Jung Ki, Min, Hyung Sik, Han, Myung Sub, Cho, Kyung Haeng, Chung, Yong-Duck, Cho, Dae-Hyung, Kim, Jeha
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Sprache:eng
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