Quantitative analysis of Cu(In,Ga)Se sub( 2) thin films by secondary ion mass spectrometry using a total number counting method
The relative atomic fraction of Cu(In,Ga)Se... (CIGS) films is one of the most important measurements for the fabrication of CIGS thin film solar cells. However, the quantitative analysis of multi-element alloy films is difficult by surface analysis methods due to the severe matrix effect. In this s...
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| Veröffentlicht in: | Metrologia 2012-08, Vol.49 (4), p.522-522 |
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| container_title | Metrologia |
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| creator | Jang, Jong Shik Hwang, Hye Hyen Kang, Hee Jae Suh, Jung Ki Min, Hyung Sik Han, Myung Sub Cho, Kyung Haeng Chung, Yong-Duck Cho, Dae-Hyung Kim, Jeha |
| description | The relative atomic fraction of Cu(In,Ga)Se... (CIGS) films is one of the most important measurements for the fabrication of CIGS thin film solar cells. However, the quantitative analysis of multi-element alloy films is difficult by surface analysis methods due to the severe matrix effect. In this study, the quantitative analysis of CIGS films was investigated by secondary ion mass spectrometry (SIMS). The atomic fractions of Cu, In, Ga and Se in the CIGS films were measured by alloy reference relative sensitivity factors derived from the certified atomic fractions of a reference CIGS film. The total ion intensities of the constituent elements were obtained by a total number counting method. The atomic fractions measured by SIMS were linearly proportional to those certified by inductively coupled plasma mass spectrometry using an isotope dilution method. The uncertainties were determined from the standard uncertainties in the measurements and those of a CIGS thin film certified reference material. (ProQuest: ... denotes formulae/symbols omitted.) |
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(CIGS) films is one of the most important measurements for the fabrication of CIGS thin film solar cells. However, the quantitative analysis of multi-element alloy films is difficult by surface analysis methods due to the severe matrix effect. In this study, the quantitative analysis of CIGS films was investigated by secondary ion mass spectrometry (SIMS). The atomic fractions of Cu, In, Ga and Se in the CIGS films were measured by alloy reference relative sensitivity factors derived from the certified atomic fractions of a reference CIGS film. The total ion intensities of the constituent elements were obtained by a total number counting method. The atomic fractions measured by SIMS were linearly proportional to those certified by inductively coupled plasma mass spectrometry using an isotope dilution method. The uncertainties were determined from the standard uncertainties in the measurements and those of a CIGS thin film certified reference material. (ProQuest: ... denotes formulae/symbols omitted.)</description><identifier>ISSN: 0026-1394</identifier><identifier>EISSN: 1681-7575</identifier><language>eng</language><subject>CIGS ; COPPER INDIUM SELENIDE ; COPPER SELENIDE ; Counting ; Gallium base alloys ; Quantitative analysis ; Secondary ion mass spectrometry ; SOLAR CELLS ; Symbols ; THIN FILMS ; Uncertainty</subject><ispartof>Metrologia, 2012-08, Vol.49 (4), p.522-522</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784</link.rule.ids></links><search><creatorcontrib>Jang, Jong Shik</creatorcontrib><creatorcontrib>Hwang, Hye Hyen</creatorcontrib><creatorcontrib>Kang, Hee Jae</creatorcontrib><creatorcontrib>Suh, Jung Ki</creatorcontrib><creatorcontrib>Min, Hyung Sik</creatorcontrib><creatorcontrib>Han, Myung Sub</creatorcontrib><creatorcontrib>Cho, Kyung Haeng</creatorcontrib><creatorcontrib>Chung, Yong-Duck</creatorcontrib><creatorcontrib>Cho, Dae-Hyung</creatorcontrib><creatorcontrib>Kim, Jeha</creatorcontrib><title>Quantitative analysis of Cu(In,Ga)Se sub( 2) thin films by secondary ion mass spectrometry using a total number counting method</title><title>Metrologia</title><description>The relative atomic fraction of Cu(In,Ga)Se... (CIGS) films is one of the most important measurements for the fabrication of CIGS thin film solar cells. However, the quantitative analysis of multi-element alloy films is difficult by surface analysis methods due to the severe matrix effect. In this study, the quantitative analysis of CIGS films was investigated by secondary ion mass spectrometry (SIMS). The atomic fractions of Cu, In, Ga and Se in the CIGS films were measured by alloy reference relative sensitivity factors derived from the certified atomic fractions of a reference CIGS film. The total ion intensities of the constituent elements were obtained by a total number counting method. The atomic fractions measured by SIMS were linearly proportional to those certified by inductively coupled plasma mass spectrometry using an isotope dilution method. The uncertainties were determined from the standard uncertainties in the measurements and those of a CIGS thin film certified reference material. 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(CIGS) films is one of the most important measurements for the fabrication of CIGS thin film solar cells. However, the quantitative analysis of multi-element alloy films is difficult by surface analysis methods due to the severe matrix effect. In this study, the quantitative analysis of CIGS films was investigated by secondary ion mass spectrometry (SIMS). The atomic fractions of Cu, In, Ga and Se in the CIGS films were measured by alloy reference relative sensitivity factors derived from the certified atomic fractions of a reference CIGS film. The total ion intensities of the constituent elements were obtained by a total number counting method. The atomic fractions measured by SIMS were linearly proportional to those certified by inductively coupled plasma mass spectrometry using an isotope dilution method. The uncertainties were determined from the standard uncertainties in the measurements and those of a CIGS thin film certified reference material. (ProQuest: ... denotes formulae/symbols omitted.)</abstract></addata></record> |
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| subjects | CIGS COPPER INDIUM SELENIDE COPPER SELENIDE Counting Gallium base alloys Quantitative analysis Secondary ion mass spectrometry SOLAR CELLS Symbols THIN FILMS Uncertainty |
| title | Quantitative analysis of Cu(In,Ga)Se sub( 2) thin films by secondary ion mass spectrometry using a total number counting method |
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