Development of High-flux Ion Source for Size-selected Nanocluster Ions Based on High-power Impulse Magnetron Sputtering

In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensit...

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Veröffentlicht in:	Chemistry letters 2013-08, Vol.42 (8), p.857-859
Hauptverfasser:	Tsunoyama, Hironori, Zhang, Chuhang, Akatsuka, Hiroki, Sekiya, Hiroki, Nagase, Tomomi, Nakajima, Atsushi
Format:	Artikel
Sprache:	eng
Schlagworte:	Anions Impulses Ion sources Ionization Magnetron sputtering Nanostructure Silver Tuning
Online-Zugang:	Volltext
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