Development of High-flux Ion Source for Size-selected Nanocluster Ions Based on High-power Impulse Magnetron Sputtering

In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensit...

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Veröffentlicht in:Chemistry letters 2013-08, Vol.42 (8), p.857-859
Hauptverfasser: Tsunoyama, Hironori, Zhang, Chuhang, Akatsuka, Hiroki, Sekiya, Hiroki, Nagase, Tomomi, Nakajima, Atsushi
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container_end_page 859
container_issue 8
container_start_page 857
container_title Chemistry letters
container_volume 42
creator Tsunoyama, Hironori
Zhang, Chuhang
Akatsuka, Hiroki
Sekiya, Hiroki
Nagase, Tomomi
Nakajima, Atsushi
description In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensity in the present method was achieved by the high throughput of the ion optics and the high ionization fraction. Fine tuning of the nanocluster size distributions was also demonstrated.
doi_str_mv 10.1246/cl.130247
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source Oxford University Press Journals All Titles (1996-Current)
subjects Anions
Impulses
Ion sources
Ionization
Magnetron sputtering
Nanostructure
Silver
Tuning
title Development of High-flux Ion Source for Size-selected Nanocluster Ions Based on High-power Impulse Magnetron Sputtering
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