Investigation of the characteristics of DLC films on oxynitriding-treated ASP23 high speed steel by DC-pulsed PECVD process

In this study, diamond-like carbon (DLC) films are coated onto oxynitriding-treated ASP23 high-speed steel by DC-pulsed PECVD. The main research parameters of the DC-pulsed PECVD process are the various duty cycles (5%, 10%, 15% and 20%) used to examine the coating characteristics. In order to inves...

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Veröffentlicht in:Surface & coatings technology 2015-01, Vol.261, p.331-336
Hauptverfasser: Chang, Shih-Hsien, Tang, Te-Chien, Huang, Kuo-Tsung, Liu, Chung-Ming
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Sprache:eng
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