Lattice imaging at an accelerating voltage of 30kV using an in-lens type cold field-emission scanning electron microscope

We reported investigation of lattice resolution imaging using a Hitachi SU9000 conventional in-lens type cold field emission scanning electron microscope without an aberration corrector at an accelerating voltage of 30kV and discuss the electron optics and optimization of observation conditions for...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Ultramicroscopy 2014-10, Vol.145, p.28-35
Hauptverfasser:	Konno, Mitsuru, Ogashiwa, Takeshi, Sunaoshi, Takeshi, Orai, Yoshihisa, Sato, Mitsugu
Format:	Artikel
Sprache:	eng
Schlagworte:	Aberration Electric potential FE-SEM Field emission Image detection Imaging Lattice imaging Lattices Low-voltage STEM Scanning electron microscopy Scanning transmission electron microscopy
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!