Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors
The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which are able to perform chemical processes at e...
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| Veröffentlicht in: | Lab on a chip 2015-01, Vol.15 (2), p.563-574 |
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| container_title | Lab on a chip |
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| creator | Jiang, Bo Haber, Julien Renken, Albert Muralt, Paul Kiwi-Minsker, Lioubov Maeder, Thomas |
| description | The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which are able to perform chemical processes at elevated temperature (>400 °C) and against concentrated harsh chemicals such as sodium hydroxide, sulfuric acid and hydrochloric acid. Various micro-scale cavities and/or fluidic channels were successfully fabricated in these microreactors using a set of combined and optimized LTCC manufacturing processes. Among them, it has been found that laser micromachining and multi-step low-pressure lamination are particularly critical to the fabrication and quality of these microreactors. Demonstration of LTCC microreactors with various embedded fluidic structures is illustrated with a number of examples, including micro-mixers for studies of exothermic reactions, multiple-injection microreactors for ionone production, and high-temperature microreactors for portable hydrogen generation. |
| doi_str_mv | 10.1039/c4lc01105h |
| format | Article |
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Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which are able to perform chemical processes at elevated temperature (>400 °C) and against concentrated harsh chemicals such as sodium hydroxide, sulfuric acid and hydrochloric acid. Various micro-scale cavities and/or fluidic channels were successfully fabricated in these microreactors using a set of combined and optimized LTCC manufacturing processes. Among them, it has been found that laser micromachining and multi-step low-pressure lamination are particularly critical to the fabrication and quality of these microreactors. 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| fulltext | fulltext |
| identifier | ISSN: 1473-0197 |
| ispartof | Lab on a chip, 2015-01, Vol.15 (2), p.563-574 |
| issn | 1473-0197 1473-0189 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1660044371 |
| source | Royal Society Of Chemistry Journals; Alma/SFX Local Collection |
| subjects | Ceramics Channels Exothermic reactions Fluidics Holes Hydrochloric acid Micromachining Microreactors Sodium hydroxide |
| title | Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors |
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