Sensing Characteristics of Shear-Mode AlN Solidly Mounted Resonators with a Silicone Microfluidic System in Viscous Media

AlN solidly mounted resonators with silicone microfluidic systems vibrating in shear mode are fabricated and characterized. The fabrication process is compatible with integrated circuits and the c-axis tilted AlN films are deposited, which allow in-liquid operation through excitation of the shear mo...

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Veröffentlicht in:	Chinese physics letters 2014-02, Vol.31 (2), p.028502-1-028502-5
Hauptverfasser:	XIONG, Juan, GUO, Peng, SUN, Xi-Liang, WANG, Sheng-Fu, HU, Ming-Zhe, GU, Hao-Shuang
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum nitride Ethyl alcohol Glycols Microfluidics Resonators Sensors Shear Silicones
Online-Zugang:	Volltext
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