High quality aluminium doped zinc oxide target synthesis from nanoparticulate powder and characterisation of sputtered thin films
Nanoparticulate aluminium-doped zinc oxide powder was synthesised through detonation and subsequent rapid quenching of metallic precursors. This technique allows for precise compositional control and rapid nanoparticle production. The resulting powder was used to form sputter targets, which were use...
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| Veröffentlicht in: | Thin solid films 2014-09, Vol.566, p.108-114 |
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| creator | Isherwood, P.J.M. Neves, N. Bowers, J.W. Newbatt, P. Walls, J.M. |
| description | Nanoparticulate aluminium-doped zinc oxide powder was synthesised through detonation and subsequent rapid quenching of metallic precursors. This technique allows for precise compositional control and rapid nanoparticle production. The resulting powder was used to form sputter targets, which were used to deposit thin films by radio frequency sputtering. These films show excellent sheet resistance and transmission values for a wide range of deposition temperatures. Crystal structure analysis shows that crystals in the target have a random orientation, whereas the crystals in the films grow perpendicular to the substrate surface and propagate preferentially along the (002) axis. Higher temperature deposition reduces crystal quality with a corresponding decrease in refractive index and an increase in sheet resistance. Films deposited between room temperature and 300°C were found to have sheet resistances equivalent to or better than indium tin oxide films for a given average transmission value.
•Nanoparticulate AZO powder was used to produce sputter targets.•The powder synthesis technique allows for precise compositional control.•Sputtered films show excellent optical, electronic and structural properties.•High temperature films show reduced electrical and structural quality.•For a given transmission, films show equivalent sheet resistances to ITO. |
| doi_str_mv | 10.1016/j.tsf.2014.07.032 |
| format | Article |
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•Nanoparticulate AZO powder was used to produce sputter targets.•The powder synthesis technique allows for precise compositional control.•Sputtered films show excellent optical, electronic and structural properties.•High temperature films show reduced electrical and structural quality.•For a given transmission, films show equivalent sheet resistances to ITO.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/j.tsf.2014.07.032</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Aluminium doped zinc oxide ; Aluminum ; Compositional control ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Cross-disciplinary physics: materials science; rheology ; Crystal structure ; Deposition ; Deposition by sputtering ; Electrical resistivity ; Exact sciences and technology ; Indium tin oxide ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Methods of nanofabrication ; Nanoparticle synthesis ; Nanoscale materials and structures: fabrication and characterization ; Nanostructure ; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation ; Optical properties of specific thin films ; Other topics in nanoscale materials and structures ; Physics ; Sputter target synthesis ; Thin films ; Transparent conducting oxide ; Zinc oxide</subject><ispartof>Thin solid films, 2014-09, Vol.566, p.108-114</ispartof><rights>2014 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c403t-ca6d4b4721bea330a8685e8c37e8b29ccc2f9d13f755a7779b7c84906283e6933</citedby><cites>FETCH-LOGICAL-c403t-ca6d4b4721bea330a8685e8c37e8b29ccc2f9d13f755a7779b7c84906283e6933</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0040609014007536$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,27901,27902,65534</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=28733535$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Isherwood, P.J.M.</creatorcontrib><creatorcontrib>Neves, N.</creatorcontrib><creatorcontrib>Bowers, J.W.</creatorcontrib><creatorcontrib>Newbatt, P.</creatorcontrib><creatorcontrib>Walls, J.M.</creatorcontrib><title>High quality aluminium doped zinc oxide target synthesis from nanoparticulate powder and characterisation of sputtered thin films</title><title>Thin solid films</title><description>Nanoparticulate aluminium-doped zinc oxide powder was synthesised through detonation and subsequent rapid quenching of metallic precursors. This technique allows for precise compositional control and rapid nanoparticle production. The resulting powder was used to form sputter targets, which were used to deposit thin films by radio frequency sputtering. These films show excellent sheet resistance and transmission values for a wide range of deposition temperatures. Crystal structure analysis shows that crystals in the target have a random orientation, whereas the crystals in the films grow perpendicular to the substrate surface and propagate preferentially along the (002) axis. Higher temperature deposition reduces crystal quality with a corresponding decrease in refractive index and an increase in sheet resistance. Films deposited between room temperature and 300°C were found to have sheet resistances equivalent to or better than indium tin oxide films for a given average transmission value.
•Nanoparticulate AZO powder was used to produce sputter targets.•The powder synthesis technique allows for precise compositional control.•Sputtered films show excellent optical, electronic and structural properties.•High temperature films show reduced electrical and structural quality.•For a given transmission, films show equivalent sheet resistances to ITO.</description><subject>Aluminium doped zinc oxide</subject><subject>Aluminum</subject><subject>Compositional control</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Crystal structure</subject><subject>Deposition</subject><subject>Deposition by sputtering</subject><subject>Electrical resistivity</subject><subject>Exact sciences and technology</subject><subject>Indium tin oxide</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Methods of nanofabrication</subject><subject>Nanoparticle synthesis</subject><subject>Nanoscale materials and structures: fabrication and characterization</subject><subject>Nanostructure</subject><subject>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</subject><subject>Optical properties of specific thin films</subject><subject>Other topics in nanoscale materials and structures</subject><subject>Physics</subject><subject>Sputter target synthesis</subject><subject>Thin films</subject><subject>Transparent conducting oxide</subject><subject>Zinc oxide</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNp9kEGLFDEQhYMoOI7-AG-5CF56rCQ9nW48yaKusLCX9Rxq0tU7NXQnvUlaHW_-c3uZxaPUoaB47xXvE-Ktgp0C1Xw47UoedhpUvQO7A6OfiY1qbVdpa9RzsQGooWqgg5fiVc4nAFBam434c833R_mw4MjlLHFcJg68TLKPM_XyNwcv4y_uSRZM91RkPodypMxZDilOMmCIM6bCfhmxkJzjz56SxNBLf8SEvlDijIVjkHGQeV7KelmTy5GDHHic8mvxYsAx05unvRXfv3y-u7qubm6_frv6dFP5GkypPDZ9faitVgdCYwDbpt1T642l9qA7770eul6Zwe73aK3tDta3dQeNbg01nTFb8f6SO6f4sFAubuLsaRwxUFyyU00DYFpt1SpVF6lPMedEg5sTT5jOToF7xO1ObsXtHnE7sG7FvXrePcVj9jgOCYPn_M-oW2vMfp2t-HjR0dr1B1Ny2TMFTz0n8sX1kf_z5S_RwZgr</recordid><startdate>20140901</startdate><enddate>20140901</enddate><creator>Isherwood, P.J.M.</creator><creator>Neves, N.</creator><creator>Bowers, J.W.</creator><creator>Newbatt, P.</creator><creator>Walls, J.M.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QF</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20140901</creationdate><title>High quality aluminium doped zinc oxide target synthesis from nanoparticulate powder and characterisation of sputtered thin films</title><author>Isherwood, P.J.M. ; Neves, N. ; Bowers, J.W. ; Newbatt, P. ; Walls, J.M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c403t-ca6d4b4721bea330a8685e8c37e8b29ccc2f9d13f755a7779b7c84906283e6933</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Aluminium doped zinc oxide</topic><topic>Aluminum</topic><topic>Compositional control</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Crystal structure</topic><topic>Deposition</topic><topic>Deposition by sputtering</topic><topic>Electrical resistivity</topic><topic>Exact sciences and technology</topic><topic>Indium tin oxide</topic><topic>Materials science</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Methods of nanofabrication</topic><topic>Nanoparticle synthesis</topic><topic>Nanoscale materials and structures: fabrication and characterization</topic><topic>Nanostructure</topic><topic>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</topic><topic>Optical properties of specific thin films</topic><topic>Other topics in nanoscale materials and structures</topic><topic>Physics</topic><topic>Sputter target synthesis</topic><topic>Thin films</topic><topic>Transparent conducting oxide</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Isherwood, P.J.M.</creatorcontrib><creatorcontrib>Neves, N.</creatorcontrib><creatorcontrib>Bowers, J.W.</creatorcontrib><creatorcontrib>Newbatt, P.</creatorcontrib><creatorcontrib>Walls, J.M.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Aluminium Industry Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Isherwood, P.J.M.</au><au>Neves, N.</au><au>Bowers, J.W.</au><au>Newbatt, P.</au><au>Walls, J.M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High quality aluminium doped zinc oxide target synthesis from nanoparticulate powder and characterisation of sputtered thin films</atitle><jtitle>Thin solid films</jtitle><date>2014-09-01</date><risdate>2014</risdate><volume>566</volume><spage>108</spage><epage>114</epage><pages>108-114</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>Nanoparticulate aluminium-doped zinc oxide powder was synthesised through detonation and subsequent rapid quenching of metallic precursors. This technique allows for precise compositional control and rapid nanoparticle production. The resulting powder was used to form sputter targets, which were used to deposit thin films by radio frequency sputtering. These films show excellent sheet resistance and transmission values for a wide range of deposition temperatures. Crystal structure analysis shows that crystals in the target have a random orientation, whereas the crystals in the films grow perpendicular to the substrate surface and propagate preferentially along the (002) axis. Higher temperature deposition reduces crystal quality with a corresponding decrease in refractive index and an increase in sheet resistance. Films deposited between room temperature and 300°C were found to have sheet resistances equivalent to or better than indium tin oxide films for a given average transmission value.
•Nanoparticulate AZO powder was used to produce sputter targets.•The powder synthesis technique allows for precise compositional control.•Sputtered films show excellent optical, electronic and structural properties.•High temperature films show reduced electrical and structural quality.•For a given transmission, films show equivalent sheet resistances to ITO.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.tsf.2014.07.032</doi><tpages>7</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | Aluminium doped zinc oxide Aluminum Compositional control Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Crystal structure Deposition Deposition by sputtering Electrical resistivity Exact sciences and technology Indium tin oxide Materials science Methods of deposition of films and coatings film growth and epitaxy Methods of nanofabrication Nanoparticle synthesis Nanoscale materials and structures: fabrication and characterization Nanostructure Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Other topics in nanoscale materials and structures Physics Sputter target synthesis Thin films Transparent conducting oxide Zinc oxide |
| title | High quality aluminium doped zinc oxide target synthesis from nanoparticulate powder and characterisation of sputtered thin films |
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