Downscaling at submicrometer scale of the gap width of interdigitated Ba0.5Sr0.5TiO3 capacitors

The goal of this work was to study the influence of shrinking the gap width between the fingers of interdigitated tunable capacitors (IDCs). Voltage control of the capacitance was achieved with a 500-nm-thick Ba 0.5 Sr 0.5 TiO 3 film which is in paraelectric state at room temperature. Eight devices...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2015-02, Vol.62 (2), p.247-254
Hauptverfasser:	Khalfallaoui, Abderrazek, Burgnies, Ludovic, Blary, Karine, Velu, Gabriel, Lippens, Didier, Carru, Jean-Claude
Format:	Artikel
Sprache:	eng
Schlagworte:	Capacitance Dielectrics Fingers Q-factor Resonant frequency Voltage measurement
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