FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications

The objective of this paper is to present simulation results of the Thickness Shear Mode (TSM) resonator based on quartz using finite element simulation method. 3D model of quartz resonator and simulations were completed using finite element method in CoventorWare software suite for design and simul...

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Veröffentlicht in:Key engineering materials 2014-01, Vol.605, p.569-572
Hauptverfasser: Laposa, Alexandr, Laposa, Igor, Husák, Miroslav, Kulha, Pavel
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Sprache:eng
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