AFM Fast Tip Approach Based on Fiber Optic Sensor
As AFM tip approach speed is one of the key factors for AFM industrial on-line detection application, a sectional fast tip approach method composed of rough approach and mild approach processes is introduced here. In rough approach process, AFM tip can be approached by step motor to certain distance...
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Veröffentlicht in: | Key engineering materials 2014-04, Vol.609-610, p.1008-1013 |
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description | As AFM tip approach speed is one of the key factors for AFM industrial on-line detection application, a sectional fast tip approach method composed of rough approach and mild approach processes is introduced here. In rough approach process, AFM tip can be approached by step motor to certain distance upon the sample surface with high speed, as a homemade dual-channel reflective intensity modulated fiber optic displacement sensor (DC-RIMFODS) can be integrated to AFM scan head easily to detect the stop position. While continued with mild approach process after rough approach, step motor can run slowly with a common PI feedback controller for Z scanner to make the tip get in touch with sample surface softly. Experimental results show that with the well-defined fiber optical sensor positioning accuracy and repeatability, the tip-sample distance can be limited in certain range after rough approach with 1mm/s high speed, and the whole AFM tip approach process can be finished in 20s by continuing with mild approach, while the initial tip-sample distance is about 10mm. |
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In rough approach process, AFM tip can be approached by step motor to certain distance upon the sample surface with high speed, as a homemade dual-channel reflective intensity modulated fiber optic displacement sensor (DC-RIMFODS) can be integrated to AFM scan head easily to detect the stop position. While continued with mild approach process after rough approach, step motor can run slowly with a common PI feedback controller for Z scanner to make the tip get in touch with sample surface softly. Experimental results show that with the well-defined fiber optical sensor positioning accuracy and repeatability, the tip-sample distance can be limited in certain range after rough approach with 1mm/s high speed, and the whole AFM tip approach process can be finished in 20s by continuing with mild approach, while the initial tip-sample distance is about 10mm.</description><identifier>ISSN: 1013-9826</identifier><identifier>ISSN: 1662-9795</identifier><identifier>EISSN: 1662-9795</identifier><identifier>DOI: 10.4028/www.scientific.net/KEM.609-610.1008</identifier><language>eng</language><publisher>Trans Tech Publications Ltd</publisher><subject>Atomic force microscopy ; Feedback ; Fiber optics ; High speed ; Motors ; Optical fibers ; Optical scanners ; Sensors</subject><ispartof>Key engineering materials, 2014-04, Vol.609-610, p.1008-1013</ispartof><rights>2014 Trans Tech Publications Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c310t-55c8407065c6c7c58347f51a4c8d8b516c8d9672ece7604d97e63084b71490363</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/3122?width=600</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Lin, Yun Sheng</creatorcontrib><creatorcontrib>Li, Han</creatorcontrib><creatorcontrib>Chen, Dai Xie</creatorcontrib><creatorcontrib>Chu, Ming Zhang</creatorcontrib><creatorcontrib>Yin, Bo Hua</creatorcontrib><creatorcontrib>Ju, Yu</creatorcontrib><title>AFM Fast Tip Approach Based on Fiber Optic Sensor</title><title>Key engineering materials</title><description>As AFM tip approach speed is one of the key factors for AFM industrial on-line detection application, a sectional fast tip approach method composed of rough approach and mild approach processes is introduced here. 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Experimental results show that with the well-defined fiber optical sensor positioning accuracy and repeatability, the tip-sample distance can be limited in certain range after rough approach with 1mm/s high speed, and the whole AFM tip approach process can be finished in 20s by continuing with mild approach, while the initial tip-sample distance is about 10mm.</description><subject>Atomic force microscopy</subject><subject>Feedback</subject><subject>Fiber optics</subject><subject>High speed</subject><subject>Motors</subject><subject>Optical fibers</subject><subject>Optical scanners</subject><subject>Sensors</subject><issn>1013-9826</issn><issn>1662-9795</issn><issn>1662-9795</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNqV0E1LAzEQBuAgCtbqf8hRkN1OdvO1x1q6Krb0YD2HNM3SlHZ3TbIU_70pFTx7mjm8vMw8CD0RyCkUcnI6nfJgnG2ja5zJWxsn7_NlzqHKeMoQAHmFRoTzIqtExa7TDqTMKlnwW3QXwh6gJJKwESLTeolrHSJeux5P-9532uzwsw52i7sW125jPV710Rn8YdvQ-Xt00-hDsA-_c4w-6_l69potVi9vs-kiMyWBmDFmJAUBnBluhGGypKJhRFMjt3LDCE-z4qKwxgoOdFsJy0uQdCMIraDk5Rg9XnrTSV-DDVEdXTD2cNCt7YagCGeEFkAKkaKzS9T4LgRvG9V7d9T-WxFQZzCVwNQfmEpgKoGpBKYSmDqDpZb5pSV63YZozU7tu8G36cl_9fwAImF7JA</recordid><startdate>20140401</startdate><enddate>20140401</enddate><creator>Lin, Yun Sheng</creator><creator>Li, Han</creator><creator>Chen, Dai Xie</creator><creator>Chu, Ming Zhang</creator><creator>Yin, Bo Hua</creator><creator>Ju, Yu</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20140401</creationdate><title>AFM Fast Tip Approach Based on Fiber Optic Sensor</title><author>Lin, Yun Sheng ; Li, Han ; Chen, Dai Xie ; Chu, Ming Zhang ; Yin, Bo Hua ; Ju, Yu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c310t-55c8407065c6c7c58347f51a4c8d8b516c8d9672ece7604d97e63084b71490363</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Atomic force microscopy</topic><topic>Feedback</topic><topic>Fiber optics</topic><topic>High speed</topic><topic>Motors</topic><topic>Optical fibers</topic><topic>Optical scanners</topic><topic>Sensors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lin, Yun Sheng</creatorcontrib><creatorcontrib>Li, Han</creatorcontrib><creatorcontrib>Chen, Dai Xie</creatorcontrib><creatorcontrib>Chu, Ming Zhang</creatorcontrib><creatorcontrib>Yin, Bo Hua</creatorcontrib><creatorcontrib>Ju, Yu</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Key engineering materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lin, Yun Sheng</au><au>Li, Han</au><au>Chen, Dai Xie</au><au>Chu, Ming Zhang</au><au>Yin, Bo Hua</au><au>Ju, Yu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>AFM Fast Tip Approach Based on Fiber Optic Sensor</atitle><jtitle>Key engineering materials</jtitle><date>2014-04-01</date><risdate>2014</risdate><volume>609-610</volume><spage>1008</spage><epage>1013</epage><pages>1008-1013</pages><issn>1013-9826</issn><issn>1662-9795</issn><eissn>1662-9795</eissn><abstract>As AFM tip approach speed is one of the key factors for AFM industrial on-line detection application, a sectional fast tip approach method composed of rough approach and mild approach processes is introduced here. In rough approach process, AFM tip can be approached by step motor to certain distance upon the sample surface with high speed, as a homemade dual-channel reflective intensity modulated fiber optic displacement sensor (DC-RIMFODS) can be integrated to AFM scan head easily to detect the stop position. While continued with mild approach process after rough approach, step motor can run slowly with a common PI feedback controller for Z scanner to make the tip get in touch with sample surface softly. 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subjects | Atomic force microscopy Feedback Fiber optics High speed Motors Optical fibers Optical scanners Sensors |
title | AFM Fast Tip Approach Based on Fiber Optic Sensor |
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