Visible Light Sensor Based on Metal-Oxide-Semiconductor Structure

We present results for the effect of visible and UV light on the capacitance-voltage characteristics of a p-type Si based Metal-Oxide-Semiconductor ring-dot structure. It is shown that the structure can be used as a low cost sensor that is simple and easy to manufacture. The sensor can be used to me...

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Veröffentlicht in:Key engineering materials 2014-04, Vol.605, p.384-387
Hauptverfasser: Nedev, Roumen, Sanchez, Alejandro, Nesheva, Diana, Nedev, Nicola, Valdez, Benjamin, Arias, Abraham, Curiel, Mario, Manolov, Emil, Herrera, Rigoberto, Mateos, David
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container_start_page 384
container_title Key engineering materials
container_volume 605
creator Nedev, Roumen
Sanchez, Alejandro
Nesheva, Diana
Nedev, Nicola
Valdez, Benjamin
Arias, Abraham
Curiel, Mario
Manolov, Emil
Herrera, Rigoberto
Mateos, David
description We present results for the effect of visible and UV light on the capacitance-voltage characteristics of a p-type Si based Metal-Oxide-Semiconductor ring-dot structure. It is shown that the structure can be used as a low cost sensor that is simple and easy to manufacture. The sensor can be used to measure visible and UV light intensity or as a light switch. The output signal is change of the inversion capacitance under light illumination at a given bias. The device power consumption is very low and the output signal is independent of the temperature.
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subjects Devices
Illumination
Inversions
Low cost
Power consumption
Sensors
Silicon
Switches
title Visible Light Sensor Based on Metal-Oxide-Semiconductor Structure
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