Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer

In this paper, a high-sensitivity total-internal-reflection (TIR) heterodyne interferometer is proposed for measuring small angles. In the proposed interferometer, a half-wave plate and two quarter-wave plates that exhibit specific optic-axis azimuths are combined to form a phase shifter. When a rho...

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Veröffentlicht in:	Applied optics (2004) 2014-03, Vol.53 (9), p.1903-1908
Hauptverfasser:	Lin, Jiun-You, Liao, Yu-Cheng
Format:	Artikel
Sprache:	eng
Schlagworte:	Analyzers Angular resolution Azimuth Dynamic range Feasibility Interferometers Phase shift Phase shifters
Online-Zugang:	Volltext
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