Mass-scale calibration of TOF-SIMS spectra using quaternary ammonium ions

A novel method with quaternary ammonium salts as internal additives has been applied to the mass‐scale calibration of time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS). Five kinds of quaternary ammonium salts, octyltrimethylammonium bromide (C8TMA), tetradecyltrimethylammonium chloride (C14T...

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Veröffentlicht in:	Surface and interface analysis 2014-11, Vol.46 (S1), p.229-232
Hauptverfasser:	Kobayashi, Daisuke, Otomo, Shinya, Aoyagi, Satoka, Itoh, Hiroto
Format:	Artikel
Sprache:	eng
Schlagworte:	Additives Calibration Carbon Chlorides Fragmentation internal additive mass-scale calibration Molecular ions quaternary ammonium ion Quaternary ammonium salts relative mass accuracy Secondary ion mass spectrometry TOF-SIMS
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