Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

When applied to the measurement of smooth surfaces, coherence scanning interferometry can be described by a three-dimensional linear filtering operation that is characterized either by the point-spread function in the space domain or equivalently by the transfer function (TF) in the spatial frequenc...

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Bibliographische Detailangaben

Veröffentlicht in:	Applied optics (2004) 2014-03, Vol.53 (8), p.1554-1563
Hauptverfasser:	Mandal, Rahul, Coupland, Jeremy, Leach, Richard, Mansfield, Daniel
Format:	Artikel
Sprache:	eng
Schlagworte:	Aberration Calibration Coherence Defects Interferometry Lenses Three dimensional
Online-Zugang:	Volltext
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