Mechanical and Structural Properties of Superhard TiAlSiN Coatings Deposited by Arc Ion Plating of Cylindrical Cathode

TiAlSiN coatings were deposited on WC-Co metal by using a cathodic arc ion deposition method of cylindrical cathode. We used Ti / Al (50 / 50 at.%) arc target and silicon sputter target. The influence of the nitrogen pressure, TiAl cathode arc current, bias voltage, and deposition temperature on the...

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Veröffentlicht in:	Materials science forum 2014-05, Vol.783-786, p.1426-1431
Hauptverfasser:	Kim, Wang Ryeol, Kwon, Min Chul, Lee, Jung Hoon, Jung, Uoo Chang, Chung, Won Sub
Format:	Artikel
Sprache:	eng
Schlagworte:	Arc deposition Carbides Cathode sputtering Cathodes Cermets Coatings Deposition Intermetallic compounds Intermetallics Titanium aluminides X-ray photoelectron spectroscopy
Online-Zugang:	Volltext
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