Effect of substrate temperature on indium tin oxide (ITO) thin films deposited by jet nebulizer spray pyrolysis and solar cell application
This study focused on the effect of substrate temperature (350°C, 400°C, and 450°C) on morphological, optical, and electrical properties of indium tin oxide (ITO) films deposited onto porous silicon/sodalime glass substrates through jet nebulizer spray pyrolysis for use in heterojunction solar cells...
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| Veröffentlicht in: | Materials science in semiconductor processing 2014-11, Vol.27, p.562-568 |
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| creator | Marikkannu, S. Kashif, M. Sethupathy, N. Vidhya, V.S. Piraman, Shakkthivel Ayeshamariam, A. Bououdina, M. Ahmed, Naser M. Jayachandran, M. |
| description | This study focused on the effect of substrate temperature (350°C, 400°C, and 450°C) on morphological, optical, and electrical properties of indium tin oxide (ITO) films deposited onto porous silicon/sodalime glass substrates through jet nebulizer spray pyrolysis for use in heterojunction solar cells. X-ray diffraction analysis confirmed the formation of pure and single-phase In2O3 for all the deposited films whose crystallinity was enhanced with increasing substrate temperature, as shown by the increasing (222) peak intensity. Morphological observations were conducted using scanning electron microscopy to reveal the formation of continuous dense films composed of nanograins. The UV–vis spectra revealed that the transmittance increased with increasing substrate temperature, reaching a value of over 80% at 450°C. The photoelectric performance of the solar cell was studied using the I–V curve by illuminating the cell at 100mW/cm2. A high efficiency (η) of 3.325% with Isc and Voc values of 14.8mA/cm2 and 0.60V, respectively, was attained by the ITO solar cell annealed at 450°C. |
| doi_str_mv | 10.1016/j.mssp.2014.07.036 |
| format | Article |
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X-ray diffraction analysis confirmed the formation of pure and single-phase In2O3 for all the deposited films whose crystallinity was enhanced with increasing substrate temperature, as shown by the increasing (222) peak intensity. Morphological observations were conducted using scanning electron microscopy to reveal the formation of continuous dense films composed of nanograins. The UV–vis spectra revealed that the transmittance increased with increasing substrate temperature, reaching a value of over 80% at 450°C. The photoelectric performance of the solar cell was studied using the I–V curve by illuminating the cell at 100mW/cm2. A high efficiency (η) of 3.325% with Isc and Voc values of 14.8mA/cm2 and 0.60V, respectively, was attained by the ITO solar cell annealed at 450°C.</description><identifier>ISSN: 1369-8001</identifier><identifier>EISSN: 1873-4081</identifier><identifier>DOI: 10.1016/j.mssp.2014.07.036</identifier><language>eng</language><publisher>Kidlington: Elsevier Ltd</publisher><subject>Applied sciences ; Cross-disciplinary physics: materials science; rheology ; Current–voltage characteristics ; Deposition ; Electronics ; Energy ; Exact sciences and technology ; Heterojunction solar cell ; Indium tin oxide ; Inhalers ; ITO ; Jet spray pyrolysis ; Materials science ; Metals. Metallurgy ; Methods of deposition of films and coatings; film growth and epitaxy ; Natural energy ; Optical properties ; Optoelectronic devices ; Photovoltaic cells ; Photovoltaic conversion ; Physics ; Production techniques ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Semiconductors ; Silicon substrates ; Solar cells ; Solar cells. 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X-ray diffraction analysis confirmed the formation of pure and single-phase In2O3 for all the deposited films whose crystallinity was enhanced with increasing substrate temperature, as shown by the increasing (222) peak intensity. Morphological observations were conducted using scanning electron microscopy to reveal the formation of continuous dense films composed of nanograins. The UV–vis spectra revealed that the transmittance increased with increasing substrate temperature, reaching a value of over 80% at 450°C. The photoelectric performance of the solar cell was studied using the I–V curve by illuminating the cell at 100mW/cm2. A high efficiency (η) of 3.325% with Isc and Voc values of 14.8mA/cm2 and 0.60V, respectively, was attained by the ITO solar cell annealed at 450°C.</description><subject>Applied sciences</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Current–voltage characteristics</subject><subject>Deposition</subject><subject>Electronics</subject><subject>Energy</subject><subject>Exact sciences and technology</subject><subject>Heterojunction solar cell</subject><subject>Indium tin oxide</subject><subject>Inhalers</subject><subject>ITO</subject><subject>Jet spray pyrolysis</subject><subject>Materials science</subject><subject>Metals. Metallurgy</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Natural energy</subject><subject>Optical properties</subject><subject>Optoelectronic devices</subject><subject>Photovoltaic cells</subject><subject>Photovoltaic conversion</subject><subject>Physics</subject><subject>Production techniques</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Semiconductors</subject><subject>Silicon substrates</subject><subject>Solar cells</subject><subject>Solar cells. Photoelectrochemical cells</subject><subject>Solar energy</subject><subject>Spray coating techniques</subject><subject>Spray pyrolysis</subject><subject>Surface treatment</subject><subject>Thin films</subject><issn>1369-8001</issn><issn>1873-4081</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNp9kU-L1jAQxosouK5-AU-5COuh3aRp0wS8yLLqwsJe1nNIkwnmpW1qJhXrR_BTm_IuHvc0w_CbP88zVfWe0YZRJq5PzYy4Ni1lXUOHhnLxorpgcuB1RyV7WXIuVC0pZa-rN4gnSmnfMnFR_b31Hmwm0RPcRszJZCAZ5hVKtiUgcSFhcWGbSQ4Lib-DA3J19_jwkeQfpeDDNCNxsEYMGRwZd3KCTBYYtyn8gURwTWYn657itGNAYhZHME4mEQvTRMy6TsGaHOLytnrlzYTw7ileVt-_3D7efKvvH77e3Xy-ry0XPNc9a1WR2YvOSN4LMQoA6a1yXo5eMdlxK3rTKSeUkT0beqcOajRg23YwA7-srs5z1xR_boBZzwGPY8wCcUPNRM_4wHjHC9qeUZsiYgKv1xRmk3bNqD6M1yd9GK8P4zUddDG-NH14mm_Qmskns9iA_ztbqThVgyzcpzMHReyvAEmjDbBYcCGVl2gXw3Nr_gHO9Ztp</recordid><startdate>20141101</startdate><enddate>20141101</enddate><creator>Marikkannu, S.</creator><creator>Kashif, M.</creator><creator>Sethupathy, N.</creator><creator>Vidhya, V.S.</creator><creator>Piraman, Shakkthivel</creator><creator>Ayeshamariam, A.</creator><creator>Bououdina, M.</creator><creator>Ahmed, Naser M.</creator><creator>Jayachandran, M.</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20141101</creationdate><title>Effect of substrate temperature on indium tin oxide (ITO) thin films deposited by jet nebulizer spray pyrolysis and solar cell application</title><author>Marikkannu, S. ; Kashif, M. ; Sethupathy, N. ; Vidhya, V.S. ; Piraman, Shakkthivel ; Ayeshamariam, A. ; Bououdina, M. ; Ahmed, Naser M. ; Jayachandran, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c363t-5129014564a83566b6ee8fc9df8bf91843c65a49d69a85175d9566bbaec227a73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Applied sciences</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Current–voltage characteristics</topic><topic>Deposition</topic><topic>Electronics</topic><topic>Energy</topic><topic>Exact sciences and technology</topic><topic>Heterojunction solar cell</topic><topic>Indium tin oxide</topic><topic>Inhalers</topic><topic>ITO</topic><topic>Jet spray pyrolysis</topic><topic>Materials science</topic><topic>Metals. Metallurgy</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Natural energy</topic><topic>Optical properties</topic><topic>Optoelectronic devices</topic><topic>Photovoltaic cells</topic><topic>Photovoltaic conversion</topic><topic>Physics</topic><topic>Production techniques</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Semiconductors</topic><topic>Silicon substrates</topic><topic>Solar cells</topic><topic>Solar cells. 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X-ray diffraction analysis confirmed the formation of pure and single-phase In2O3 for all the deposited films whose crystallinity was enhanced with increasing substrate temperature, as shown by the increasing (222) peak intensity. Morphological observations were conducted using scanning electron microscopy to reveal the formation of continuous dense films composed of nanograins. The UV–vis spectra revealed that the transmittance increased with increasing substrate temperature, reaching a value of over 80% at 450°C. The photoelectric performance of the solar cell was studied using the I–V curve by illuminating the cell at 100mW/cm2. A high efficiency (η) of 3.325% with Isc and Voc values of 14.8mA/cm2 and 0.60V, respectively, was attained by the ITO solar cell annealed at 450°C.</abstract><cop>Kidlington</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.mssp.2014.07.036</doi><tpages>7</tpages></addata></record> |
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| ispartof | Materials science in semiconductor processing, 2014-11, Vol.27, p.562-568 |
| issn | 1369-8001 1873-4081 |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Applied sciences Cross-disciplinary physics: materials science rheology Current–voltage characteristics Deposition Electronics Energy Exact sciences and technology Heterojunction solar cell Indium tin oxide Inhalers ITO Jet spray pyrolysis Materials science Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy Natural energy Optical properties Optoelectronic devices Photovoltaic cells Photovoltaic conversion Physics Production techniques Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors Silicon substrates Solar cells Solar cells. Photoelectrochemical cells Solar energy Spray coating techniques Spray pyrolysis Surface treatment Thin films |
| title | Effect of substrate temperature on indium tin oxide (ITO) thin films deposited by jet nebulizer spray pyrolysis and solar cell application |
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