High efficiency PERL cells on CZ P-type crystalline silicon using a thermally stable a-Si:H/SiNx rear surface passivation stack

For the purpose of manufacturing high efficiency p-type CZ crystalline silicon (c-Si) solar cells with conventional plated metallization and a passivated rear surface and local contacts, a thermally stable passivating system of plasma-enhanced chemical vapor deposition (PECVD) deposited a-Si:H/SiNx:...

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Veröffentlicht in:	Solar energy materials and solar cells 2013-10, Vol.117, p.41-47
Hauptverfasser:	Li, Hua, Wenham, Stuart Ross, Shi, Zhengrong
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Applied sciences Chemical vapor deposition Crystal structure Direct energy conversion and energy accumulation Electrical engineering. Electrical power engineering Electrical power engineering Energy Exact sciences and technology Natural energy Perl Photoelectric conversion Photovoltaic conversion Silicon Solar cells Solar cells. Photoelectrochemical cells Solar energy Stack Stacks Surface passivation Thermal stability Wafers
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