Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene te...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2013-10, Vol.200, p.51-55
Hauptverfasser: Do, Young Ho, Jung, Woo Suk, Kang, Min Gyu, Kang, Chong Yun, Yoon, Seok Jin
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container_start_page 51
container_title Sensors and actuators. A. Physical.
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creator Do, Young Ho
Jung, Woo Suk
Kang, Min Gyu
Kang, Chong Yun
Yoon, Seok Jin
description The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.
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subjects Actuators
Devices
Electronic devices
Energy harvesting
Ferroelectric properties
Films process
Functional applications
Harvesters
Laser lift-off
Lasers
Lead zirconate titanates
Piezoelectricity
Polyethylene terephthalates
PZT
Transparent flexible electronics
title Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process
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