Investigation on the Gas Sensing Properties of ZnO Thin Films

ZnO is an important sensitive semiconductor gas material, it belongs to surface-controlled gas sensors, which has been developed as early as in the 60s. Compare to another two series of metal oxide gas sensing materials SnO2 and Fe2O3, ZnO is more stable. But its sensitivity is lower and its working temperature is higher, moreover, its selectivity isn’t good[1]. Therefore, the improvement of ZnO gas sensitive materials mainly focuses on raising sensitivity, improving selectivity, lowering temperature and other aspects of the work.ZnO films have a certain potential market and good industrical prospect. With the rapid deep development of the research, the application of ZnO thin film technology will continue to permeate into many kinds of areas.Including production and life. At present,these methods that have been reported such as precious metals, rare earth doped oxide composite doped, surface modification have achieved good progress[2~5].