Piezoelectric sensing of electrothermally actuated silicon carbide MEMS resonators

[Display omitted] •MEMS resonators with electrothermal actuation and piezoelectric sensing are presented.•Pt electrothermal actuator and PZT piezoelectric sensor are fabricated on SiC bridge.•Influence of piezoelectric sensor design on the device performance has been studied.•Devices with shorter se...

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Veröffentlicht in:	Microelectronic engineering 2014-05, Vol.119, p.24-27
Hauptverfasser:	Sviličić, Boris, Mastropaolo, Enrico, Cheung, Rebecca
Format:	Artikel
Sprache:	eng
Schlagworte:	Beams (structural) Devices Electrothermal actuation MEMS resonator Piezoelectric sensing Piezoelectricity Q factors Resonators Sensors Silicon carbide Tuning
Online-Zugang:	Volltext
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