Preparation of high laser-induced damage threshold Ta2O5 films

•High LIDT Ta2O5 films were prepared using TaCl5 as precursor.•We revealed the functions of H2O2 in the sol formation.•The high LIDT was attributed to the nearly free of defects. High laser-induced damage threshold (LIDT) Ta2O5 films were prepared by the sol–gel method using TaCl5 as a new precursor...

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Veröffentlicht in:Applied surface science 2014-08, Vol.309, p.194-199
Hauptverfasser: Xu, Cheng, Yi, Peng, Fan, Heliang, Qi, Jianwei, Yang, Shuai, Qiang, Yinghuai, Liu, Jiongtian, Li, Dawei
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Sprache:eng
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